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학위논문 동서
CF4가스 프라즈마 에칭 特性 및 SiH4-N2가스 프라즈마 CVD SiN 薄膜 特性=Characteristics of CF4 gas plasma etching and PE-CVD SiN films using SiH
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高麗大學校 1986
[ 569.8 신225C ]
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