공지
예치금 반환 재안내
도서관 자료실 휴실 안내(10. 1., 10. 3., 10. 9.)
2024학년도 도서관 전자정보박람회 경품 추첨 결과 및 수령 안내
2024학년도 2학기 도서관 정보활용교육 안내
학술 생성형 AI 서비스 「tlooto」 시범 운영 안내
이전
다음
Close today
공지사항 닫기
DAU Library
Central Library
Dong-A University
LOGIN
Off-Campus Access
OFF
KO
Open the search box
Search"
Search
All
Library Catalog
eJournals
Databases
e-Learning
e-Learning
INSPIRE
KOCW
Overseas OCW/MOOC List
eBooks
Collections
New Arrivals(Subject)
Popular Books
Recommendations
DAU Reading List
Book Gallery
Research book
Research Support
Journal Evaluation
Subject Guides
Plagiarism Prevention
Plagiarism Prevention
Research Ethics
References Management
Thesis Submission
Document Delivery Service/Interlibrary Loan
Document Delivery Service/Interlibrary Loan
Medicine, Nursing(Request_Journal)
Medicine, Nursing(Request_Thesis)
DDS/ILL – Request list
Library Instruction
Library Instruction Guide
Library Instruction Request
Group Instruction Request
Libaray Services
Use Using Materials
Borrow/Renew/Return
Inter-Campus Loan
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
Facilities
Group Study Room
Group Study Room Request
Reading Room
Visit Other Libraries(Data)
Visit Other Libraries for Material Use
Visit Other Libraries Request(Data)
Request History (Material Use)
Visit Other Libraries(Reading Room)
Visit Other Libraries Guide(Reading Room)
Visit Other Libraries Request(Reading Room)
Request History (Reading Room)
User Guide
Undergraduates
Graduates students
Faculty/Staff
Special member
Etc.
Mobile Service
Mobile Web
Mobile Seat Allocation
Mobile ID Card
WiFi
Off-Campus Access
Find Services
About our Library
Overview
Overview
History
Status
Regulations
Organization/Staff
Library Hours
Floor Guide
Donations
How to Donate
List
Cyber Memorial Collection
Directions
Community
Notice
Notice(Datebases)
Q&A
Q&A
FAQ
Book Reviews
Best Reviews
Program Feedback
Forms
Error Inquiry
My Library
Borrow/Renew
Borrow/Renew
History
Inter-Campus Loan List
My Request List
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
DDS – Request List
Group Study Room
Library Instruction
My Shelf
My Book Reviews
Personal Information
Profile
Notice
Quick Menu
My Shelf
Error Inquiry
메뉴 전체보기
eJournals
Home
>
Search
>
eJournals
>
All
Library Catalog
eArticles
eJournals
전체
ISSN
논문 제목
Journal Title
저자
엡스코 구버전 바로가기
발행년도
-
(ex : 2010-2015)
'
학술논문
' 에서의 검색결과
23
건 | List
1~10
Select All
Relevance
Date Newest
Date Oldest
5
10
20
30
40
50
E-Mail
EndNote
RefWorks
1 . Conference
Inline detection for FinFET gate poly footing using e-Tilt metrology
저자
by
Zhang, Xiaoxiao
;
Karakoy, Mert
;
Wu, Kejia
;
Chen, Zhuangfei
;
Ge, Zhenhua
, et al.
소스
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2018 29th Annual. :320-323 Apr, 2018
Full Text (IEEE)
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
Roughness characterization of gate all around Silicon Nano Wire fabrication
저자
by
Levi, Shimon
;
Schwarzband, Ishai
;
Kris, Roman
;
Adan, Ofer
.
소스
2012 IEEE 27th Convention of Electrical and Electronics Engineers in Israel Electrical & Electronics Engineers in Israel (IEEEI), 2012 IEEE 27th Convention of. :1-5 Nov, 2012
Full Text (IEEE)
요약보기
Export
E-Mail
EndNote
RefWorks
6 . Conference
Physical matching of CD-SEM: noise analysis and verification in FAB environment.
저자
by
Kramer, Uwe
;
Navarra, Alessandra
;
Fleischer, Goeran
;
Kaiser, Jan
;
Voss, Frank
, et al.
소스
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69221R-69221R-11, 11p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
Physical matching versus CD matching for CD SEM.
저자
by
Kris, Roman
;
Zuckerman, Galit
;
Sommer, Elad
;
Hadad, Zion
;
Dror, Shalev
, et al.
소스
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65180O-65180O-12, 12p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
Advanced 2D structures metrology with CD-SEM for OPC challenges.
저자
by
Kris, Roman
;
Tam, Aviram
;
Peltinov, Ram
;
Menadeva, Ovadya
;
Adan, Ofer
, et al.
소스
Proceedings of SPIE; Nov2005, Issue 1, p130-141, 12p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
Verification of height and sidewall angle SEM metrology accuracy using Monte Carlo simulation.
저자
by
Kris, Roman
;
Adan, Ofer
;
Tam, Aviram
;
Karabekov, Albert
;
Menadeva, Ovadya
, et al.
소스
Proceedings of SPIE; Nov2005, Issue 1, p168-179, 12p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
Inline sidewall angle monitoring of memory capacitor profiles.
저자
by
Rathsack, Ben M.
;
Bushman, Scott G.
;
Celii, Francis G.
;
Ayres, Stephen F.
;
Kris, Roman
.
소스
Proceedings of SPIE; Nov2005, Issue 1, p1237-1247, 11p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
Height and sidewall angle SEM metrology accuracy.
저자
by
Kris, Roman
;
Adan, Ofer
;
Tam, Aviram
;
Karabekov, Albert Y.
;
Menadeva, Ovadya
, et al.
소스
Proceedings of SPIE; Nov2004, Issue 1, p1212-1223, 12p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
CD-SEM application for generic analysis of two-dimensional features on wafers and reticles.
저자
by
Kris, Roman
;
Tam, Aviram
;
Menadeva, Ovadya
;
Peltinov, Ram
;
Segal, Liraz
, et al.
소스
Proceedings of SPIE; Nov2004, Issue 1, p1224-1234, 11p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
Mask metrology 2D application for measurement of OPC features and corner roundness.
저자
by
Kris, Roman
;
Menadeva, Ovadya
;
Tam, Aviram
;
Peltinov, Ram
;
Segal, Liraz
, et al.
소스
Proceedings of SPIE; Nov2004, Issue 1, p698-707, 10p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
1
2
3
Next
메일 발송
로그인후 이용해주세요.
이동하기
Full menu
Close full menu
Search
All
Library Catalog
eJournals
Databases
e-Learning
e-Learning
INSPIRE
KOCW
Overseas OCW/MOOC List
eBooks
Collections
New Arrivals(Subject)
Popular Books
Recommendations
DAU Reading List
Book Gallery
Research book
Research Support
Journal Evaluation
Subject Guides
Plagiarism Prevention
Plagiarism Prevention
Research Ethics
References Management
Thesis Submission
Document Delivery Service/Interlibrary Loan
Document Delivery Service/Interlibrary Loan
Medicine, Nursing(Request_Journal)
Medicine, Nursing(Request_Thesis)
DDS/ILL – Request list
Library Instruction
Library Instruction Guide
Library Instruction Request
Group Instruction Request
Libaray Services
Use Using Materials
Borrow/Renew/Return
Inter-Campus Loan
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
Facilities
Group Study Room
Group Study Room Request
Reading Room
Visit Other Libraries(Data)
Visit Other Libraries for Material Use
Visit Other Libraries Request(Data)
Request History (Material Use)
Visit Other Libraries(Reading Room)
Visit Other Libraries Guide(Reading Room)
Visit Other Libraries Request(Reading Room)
Request History (Reading Room)
User Guide
Undergraduates
Graduates students
Faculty/Staff
Special member
Etc.
Mobile Service
Mobile Web
Mobile Seat Allocation
Mobile ID Card
WiFi
Off-Campus Access
Find Services
About our Library
Overview
Overview
History
Status
Regulations
Organization/Staff
Library Hours
Floor Guide
Donations
How to Donate
List
Cyber Memorial Collection
Directions
Community
Notice
Notice(Datebases)
Q&A
Q&A
FAQ
Book Reviews
Best Reviews
Program Feedback
Forms
Error Inquiry
My Library
Borrow/Renew
Borrow/Renew
History
Inter-Campus Loan List
My Request List
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
DDS – Request List
Group Study Room
Library Instruction
My Shelf
My Book Reviews
Personal Information
Profile
Notice