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1 . Conference
CD metrology for EUV lithography and etch
저자
by
Johanesen, Hayley
;
Kenslea, Anne
;
Williamson, Mark
;
Knowles, Matt
;
Kwakman, Laurens
, et al.
소스
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual SEMI. :329-335 May, 2015
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7 . Conference
CD-SEM metrology evaluation of gate-all-around Si nanowire MOSFET with improved control of nanowire suspension by using a buried boron nitride etch-stop layer
저자
by
Cohen, Guy M.
;
Shi, Leathen
;
Bangsaruntip, Sarunya
;
Grill, Alfred
;
Neumayer, Deborah
, et al.
소스
25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI. :248-251 May, 2014
Full Text (IEEE)
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7 . Conference
Roughness characterization of gate all around Silicon Nano Wire fabrication
저자
by
Levi, Shimon
;
Schwarzband, Ishai
;
Kris, Roman
;
Adan, Ofer
.
소스
2012 IEEE 27th Convention of Electrical and Electronics Engineers in Israel Electrical & Electronics Engineers in Israel (IEEEI), 2012 IEEE 27th Convention of. :1-5 Nov, 2012
Full Text (IEEE)
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6 . Conference
Phenomenology of ArF photoresist shrinkage trends
저자
by
Bunday, Benjamin
;
Cordes, Aaron
;
Allgair, John
;
Piscani, Emil
;
Rice, Bryan J.
, et al.
소스
2008 International Symposium on Semiconductor Manufacturing (ISSM) Semiconductor Manufacturing (ISSM), 2008 International Symposium on. :3-6 Oct, 2008
Full Text (IEEE)
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7 . Periodical
Recess metrology challenges for 3D device architectures in advanced technology nodes
저자
by
Robinson, John C.
;
Sendelbach, Matthew J.
;
Santoro, Gaetano
;
Houchens, Kevin
;
Bogdanowicz, Janusz
, et al.
소스
Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p120530L-120530L-13, 11932484p
Find it @ DONGA
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7 . Periodical
A study on diffraction-based overlay measurement based on FDTD method
저자
by
Adan, Ofer
;
Robinson, John C.
;
Xu, Buqing
;
Wu, Qiang
;
Chen, Rui
, et al.
소스
Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116113B-116113B-23, 11495211p
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7 . Periodical
Plasma assisted particle contamination control: plasma charging dependence on particle morphology
저자
by
Adan, Ofer
;
Robinson, John C.
;
van Huijstee, J. C. A.
;
van Minderhout, B.
;
Rompelberg, R. M. H.
, et al.
소스
Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116113A-116113A-6, 1045024p
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7 . Periodical
Accuracy aware pixel selection in multi-wavelength μDBO metrology enables higher robustness and accuracy for DRAM
저자
by
Adan, Ofer
;
Robinson, John C.
;
Chen, Chia Hung
;
Tsao, Sheng-Tsung
;
Du, Jie
, et al.
소스
Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116112Z-116112Z-6, 1045015p
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7 . Periodical
AFM line space trench and depth measurement of fan-out fine-pitch high aspect ratio redistribution layer structure
저자
by
Adan, Ofer
;
Robinson, John C.
;
Zhong, Sung-Hua
;
Chen, Liang-Pin
.
소스
Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116112X-116112X-5, 1045014p
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6 . Periodical
A novel method of overlay variation study for 3D NAND channel hole
저자
by
Adan, Ofer
;
Robinson, John C.
;
Tu, Leeming
;
Zhou, Haydn
;
Xiao, Erik
, et al.
소스
Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116112W-116112W-9, 1045018p
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