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11 . Conference
Influence of alloying the copper supply layer on the retention of CBRAM
저자
by
Devulder, Wouter
;
Opsomer, Karl
;
Jurczak, Malgorzata
;
Goux, Ludovic
;
Detavernier, Christophe
.
소스
2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), 2015 IEEE International. :215-218 May, 2015
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17 . Periodical
Evaluation of Ta-Co alloys as novel high-k EUV mask absorber
저자
by
Lio, Anna
;
Burkhardt, Martin
;
Thakare, Devesh
;
Wu, Meiyi
;
Opsomer, Karl
, et al.
소스
Proceedings of SPIE; June 2022, Vol. 12051 Issue: 1 p120510D-120510D-20, 11930511p
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17 . Periodical
Determination of optical constants of thin films in the EUV
저자
by
Ciesielski, Richard
;
Saadeh, Qais
;
Philipsen, Vicky
;
Opsomer, Karl
;
Soulié, Jean-Philippe
, et al.
소스
Applied Optics; March 2022, Vol. 61 Issue: 8 p2060-2078, 19p
Web of Science
Scopus
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17 . Academic Journal
Impact of changes in bond structure on ovonic threshold switching behaviour in GeSe
2
.
저자
by
Keukelier, Jonas
;
Opsomer, Karl
;
Nuytten, Thomas
;
Sergeant, Stefanie
;
Devulder, Wouter
, et al.
소스
Journal of Materials Chemistry C; 1/7/2021, Vol. 9 Issue 1, p117-126, 10p
Full Text (RSC Gold)
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17 . Conference
Mask absorber development to enable next-generation EUVL.
저자
by
Philipsen, Vicky
;
Kim Vu Luong
;
Opsomer, Karl
;
Souriau, Laurent
;
Rip, Jens
, et al.
소스
Proceedings of SPIE; 8/29/2019, Vol. 11178, p1-7, 7p
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17 . Conference
Implementing cubic-phase HfO2 with κ-value ∼ 30 in low-VT replacement gate pMOS devices for improved EOT-Scaling and reliability
저자
by
Ragnarsson, Lars-Ake
;
Adelmann, Christoph
;
Higuchi, Yuichi
;
Opsomer, Karl
;
Veloso, Anabela
, et al.
소스
2012 Symposium on VLSI Technology (VLSIT) VLSI Technology (VLSIT), 2012 Symposium on. :27-28 Jun, 2012
Full Text (IEEE)
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17 . Academic Journal
Influence of carbon content on the copper-telluride phase formation and on the resistive switching behavior of carbon alloyed Cu-Te conductive bridge random access memory cells.
저자
by
Devulder, Wouter
;
Opsomer, Karl
;
Franquet, Alexis
;
Meersschaut, Johan
;
Belmonte, Attilio
, et al.
소스
Journal of Applied Physics
. 2014, Vol. 115 Issue 5, p1-7. 7p. 8 Graphs.
Full Text (AIP)
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17 . Academic Journal
Ovonic Threshold‐Switching Ge
x
Se
y
Chalcogenide Materials: Stoichiometry, Trap Nature, and Material Relaxation from First Principles.
저자
by
Clima, Sergiu
;
Garbin, Daniele
;
Opsomer, Karl
;
Avasarala, Naga S.
;
Devulder, Wouter
, et al.
소스
Physica Status Solidi - Rapid Research Letters
. May2020, Vol. 14 Issue 5, p1-10. 10p.
Web of Science
Scopus
JCR 저널정보
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17 . Academic Journal
Assessing stability of metal tellurides as alternative photomask materials for extreme ultraviolet lithography.
저자
by
Luong, Vu
;
Philipsen, Vicky
;
Opsomer, Karl
;
Rip, Jens
;
Hendrickx, Eric
, et al.
소스
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2019, Vol. 37 Issue 6, p1-9, 9p
Web of Science
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17 . Conference
Novel EUV mask absorber evaluation in support of next-generation EUV imaging.
저자
by
Philipsen, Vicky
;
Kim Vu Luong
;
Opsomer, Karl
;
Detavernier, Christophe
;
Hendrickx, Eric
, et al.
소스
Proceedings of SPIE; 8/26/2018, Vol. 10810, p108100C-1-108100C-13, 13p
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