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11 .
Performance data of a variable transmission phase shifting mask blank for 193nm lithography enhanced by inspection contrast tuning
저자
by
Ulrich Hermanns
;
Günter Hess
;
Markus Renno
;
Konrad Knapp
;
Hans Becker
, et al.
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SPIE Proceedings
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17 .
Production challenges of making EUV mask blanks
저자
by
Christian Wies
;
Ronny Walter
;
Nathalie Olschewski
;
Markus Renno
;
Günter Hess
, et al.
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17 .
Recent results on EUV mask blank multilayers and absorbers
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by
Markus Renno
;
Nathalie Olschewski
;
Thorsten Reichardt
;
Holger Seitz
;
Hans Becker
, et al.
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SPIE Proceedings
.
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17 .
Absorber stack optimization toward EUV lithography mask blank pilot production
저자
by
Joerg Butschke
;
Corinna Koepernik
;
Markus Renno
;
Torsten Reichardt
;
Lutz Aschke
, et al.
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17 .
New solutions for inspection contrast tuning, enhanced chemical durability, and a new ultrahigh-transmission PSM
저자
by
Frank Schmidt
;
Hans Willy Becker
;
Holger Seitz
;
Konrad Knapp
;
Pascal Schley
, et al.
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17 .
Performance data on new tunable attenuating PSM for 193-nm and 157-nm lithography
저자
by
Markus Renno
;
Konrad Knapp
;
Frank Schmidt
;
Jay Chey
;
Günter Hess
, et al.
소스
SPIE Proceedings
.
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17 .
Production challenges of making an EUV mask blank
저자
by
Lutz Aschke
;
Hans W. Becker
;
Falk Friemel
;
Thomas Leutbecher
;
Nathalie Olschewski
, et al.
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17 .
Update on the EUVL mask blank activity at Schott Lithotec
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Mario Schiffler
;
Steffen Kirchner
;
Hans Willy Becker
;
Bernhard Jagle
;
Lutz Aschke
, et al.
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Scopus-Elsevier
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17 .
Development of a new PSM film system for 157-nm extensible to high-transmission 193 nm lithography
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by
Markus Renno
;
Hans Willy Becker
;
Jay Chey
;
Konrad Knapp
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Ute Buttgereit
, et al.
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17 .
High-performance 6-inch EUV mask blanks produced under real production conditions by ion-beam sputter deposition
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Markus Renno
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Hans Willy Becker
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Thomas Kuhlmann
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Norbert Kaiser
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Juergen Krieger
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