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11 . Conference
A Weak Pattern Random Creation and Scoring Method for Lithography Process Tuning.
저자
by
Meili Zhang
;
Guogui Deng
;
Mudan Wang
;
Shirui Yu
;
Xinyi Hu
, et al.
소스
Proceedings of SPIE; 1/16/2018, Vol. 10588, p1-7, 7p
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17 . Conference
Design rule manual and DRC code qualification flows empowered by high coverage synthetic layouts generation.
저자
by
Kabeel, Aliaa
;
Kim, Sutae
;
Park, Young Gook
;
Kim, Donggyun
;
Kwan, Joe
, et al.
소스
Proceedings of SPIE; 4/8/2023, Vol. 12495, p124951T-124951T-14, 1p
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17 . Periodical
A weak pattern random creation and scoring method for lithography process tuning
저자
by
Cain, Jason P.
;
Yuan, Chi-Min
;
Zhang, Meili
;
Deng, Guogui
;
Wang, Mudan
, et al.
소스
Proceedings of SPIE; March 2018, Vol. 10588 Issue: 1 p105880U-105880U-7, 952928p
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17 . Periodical
Early stage hot spot analysis through standard cell base random pattern generation
저자
by
Capodieci, Luigi
;
Cain, Jason P.
;
Jeon, Joong-Won
;
Song, Jaewan
;
Kim, Jeong-Lim
, et al.
소스
Proceedings of SPIE; April 2017, Vol. 10148 Issue: 1 p101480S-101480S-7, 913328p
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17 . Periodical
Litho hotspots fixing using model based algorithm
저자
by
Capodieci, Luigi
;
Cain, Jason P.
;
Zhang, Meili
;
Yu, Shirui
;
Mao, Zhibiao
, et al.
소스
Proceedings of SPIE; April 2017, Vol. 10148 Issue: 1 p101481B-101481B-6, 913336p
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17 . Periodical
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis
저자
by
Erdmann, Andreas
;
Kye, Jongwook
;
Hamouda, Ayman
;
Bahnas, Mohamed
;
Schumacher, Dan
, et al.
소스
Proceedings of SPIE; March 2017, Vol. 10147 Issue: 1 p101470R-101470R-9, 913240p
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17 . Conference
Improvements in post-OPC data constraints for enhanced process corrections.
저자
by
Burns, Ryan L.
;
Cui, Yuping
;
Zhao, Zengqin
;
Stobert, Ian
;
LaCour, Pat
, et al.
소스
Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61543G-61543G-10, 10p
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17 . Conference
The effect of calibration feature weighting on OPC optical and resist models: investigating the influence on model coefficients and on the overall model fitting.
저자
by
Abdo, Amr
;
Fathy, Rami
;
Madkour, Kareem
;
Oberschmidt, James
;
Fischer, Daniel
, et al.
소스
Proceedings of SPIE; Nov2005 Part 2, Issue 1, p599253-599253-8, 8p
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17 . Periodical
Design space exploration for early identification of yield limiting patterns
저자
by
Capodieci, Luigi
;
Cain, Jason P.
;
Li, Helen
;
Zou, Elain
;
Lee, Robben
, et al.
소스
Proceedings of SPIE; March 2016, Vol. 9781 Issue: 1 p97810W-97810W-8, 880299p
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17 . Periodical
A random approach of test macro generation for early detection of hotspots
저자
by
Capodieci, Luigi
;
Cain, Jason P.
;
Lee, Jong-hyun
;
Kim, Chin
;
Kang, Minsoo
, et al.
소스
Proceedings of SPIE; March 2016, Vol. 9781 Issue: 1 p97810J-97810J-6, 880297p
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