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1 . Conference
Practical lithography hotspot identification using mask process model.
저자
by
Pai Chi Chen
;
Chain Ting Huang
;
Shang Feng Weng
;
Yung Feng Cheng
;
Young Ham
, et al.
소스
Proceedings of SPIE; 7/30/2019, Vol. 11148, p111481H-1-111481H-11, 11p
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7 . Conference
Hotspot analysis and empirical correction through mask and wafer technology harmonization.
저자
by
Yohan Choi
;
Chou, William
;
Cheng, Jeffrey
;
Twu, C. H.
;
Lee, Adder
, et al.
소스
Proceedings of SPIE; 8/26/2018, Vol. 10810, p108101K-1-108101K-11, 11p
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7 . Conference
EUV Mask Manufacturing Readiness in the Merchant Mask Industry.
저자
by
Green, Michael
;
Yohan Choi
;
Young Ham
;
Kamberian, Henry
;
Progler, Chris
, et al.
소스
Proceedings of SPIE; 8/14/2017, Vol. 10450, p1-10, 10p
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7 .
Model based mask process correction for EUV Mask
저자
by
Michael Green
;
Brian Dillon
;
Ahmad Syukri
;
Mohamed Ramadan
;
Chris Progler
, et al.
소스
Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology
.
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7 .
Verification of Spent Fuel Inside Dry Storage Casks by Fast/Epi-thermal Neutron Mapping: FY2020 Annual Report to NA241 (Annual Report)
저자
by
P Kerr
;
Shiva Sitaraman
;
Young Ham
.
소스
Open Access (OpenAIRE)
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5 .
Patterning solutions for NTD contact hole levels in advanced DRAM nodes
저자
by
Michael Green
;
Lucien Bouchard
;
Young Ham
;
Wei-Cheng Shiu
;
Hung-Chang Szu
, et al.
소스
Photomask Technology 2020
.
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7 . Conference
Methodology and Determination of Field of View of Neutron and Gamma Detectors in the Atucha Spent Fuel Storage Pool.
저자
by
Walters, William
;
Wenner, Michael
;
Haghighat, Alireza
;
Sitaraman, Shivakumar
;
Young Ham
.
소스
Proceedings of the Institute of Nuclear Materials Management Annual Meeting; 2009, p1-10, 10p, 1 Color Photograph, 5 Diagrams, 6 Charts, 3 Graphs
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7 .
Accurate Mask Model Approaches for Wafer Hot Spot Prepdition and Verificaition
저자
by
Chris Progler
;
Michael Green
;
Hong Jen Lee
;
Mohamed Ramadan
;
Colbert Lu
, et al.
소스
2020 China Semiconductor Technology International Conference (CSTIC)
.
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7 .
EUVL mask process development and verification using advanced modeling and characterization techniques
저자
by
Stuart A. Sieg
;
Mohamed Ramadan
;
Michael Green
;
Romain Lallement
;
Henry Kamberian
, et al.
소스
Extreme Ultraviolet (EUV) Lithography XI
.
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7 . Academic Journal
ASSESSMENT OF THE FINGERPRINTING METHOD FOR THE VERIFICATION OF SPENT FUEL IN MACSTOR KN-400 CANDU SPENT-FUEL DRY STORAGE.
저자
by
CHANDREGOWDA, NANDAN G.
;
CHIRAYATH, SUNIL S.
;
CHARLTON, WILLIAM S.
;
YOUNG HAM
;
SITARAMAN, SHIVA
, et al.
소스
Nuclear Technology
. Dec2013, Vol. 184 Issue 3, p320-332. 13p.
Web of Science
Scopus
JCR 저널정보
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