Scalable microshutter focal plane masks for UV, visible, and infrared spectroscopy
- Resource Type
- Article
- Authors
- Siegmund, Oswald H.; Hoadley, Keri; Kutyrev, Alexander; Greenhouse, Matthew; Chang, Meng-Ping; Scowen, Paul; Brekosky, Regis; Kim, Kyowon; Costen, Nicholas; Kotecki, Carl; Ke, Ming; Hu, Gang; Wang, Frederick; Paquette, Beth; Ray, Knute; Fettig, Rainer; McCandliss, Stephan
- Source
- Proceedings of SPIE; October 2023, Vol. 12678 Issue: 1 p126780Q-126780Q-0, 1141021p
- Subject
- Language
- ISSN
- 0277786X