Spacer multi-patterning control strategy with optical CD metrology on device structures
- Resource Type
- Article
- Authors
- Sanchez, Martha I.; Ukraintsev, Vladimir A.; Lee, Jongsu; Lee, Byoung-Hoon; Ma, Won-Kwang; Han, Sang-Jun; Kim, Young-Sik; Kwak, Noh-Jung; Theeuwes, Thomas; Guo, Wei; Song, Yi; Wisse, Baukje; Kruijswijk, Stefan; Cramer, Hugo; Welch, Steven; Verma, Alok; Zhang, Rui; Chai, Yvon; Hsu, Sharon; Miceli, Giacomo; Sun, Kyu-Tae; Byun, Jin-Moo
- Source
- Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97782B-97782B-11, 9680430p
- Subject
- Language
- ISSN
- 0277786X