Tunable evanescent-mode cavity filter with closed loop control
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An evanescent-mode cavity filter with an improved MEMS tuner design is disclosed. The MEMS tuner design allows for the independent control of individual poles in a multi-pole filter, which increases the adaptability of the filter in a crowded RF environment. The filter is further designed to minimize tuning voltages and hysteresis effects. A closed loop control system provides highly responsive tuning of the filter. The closed loop control allows for accurate and stable tuning that compensates for temperature and vibrational effects, while the tuner design enables fast tuning and significantly increases the resolution of the feedback measurement by eliminating charge buildup in the tuner substrate.