U-shaped MEMS tunable microwave resonators
- Resource Type
- Conference
- Authors
- Giacomozzi, Flavio; Proietti, Emanuela; Capoccia, Giovanni; Sardi, Giovanni Maria; Bartolucci, Giancarlo; Iannacci, Jacopo; Margesin, Benno; Marcelli, Romolo
- Source
- 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2022 Symposium on. :1-5 Jul, 2022
- Subject
- Components, Circuits, Devices and Systems
Micromechanical devices
Radio frequency
Performance evaluation
Microswitches
Resonant frequency
Microwave devices
Packaging
RF MEMS
microwave resonators
frequency tunability
- Language
Compact, U-shaped microwave resonators have been designed and implemented with RF MEMS switches to obtain frequency tunable narrow-band devices. The U-shape has been used to develop a resonator optimizing its size. In addition, RF MEMS ohmic switches have been introduced to implement the frequency tunability in a small range and to provide a high signal rejection ratio in the ON-OFF states. Device configurations working at frequencies between 20 GHz ca. and 26 GHz ca. have been studied.