A Novel Multilayer SIW Filter Using Silicon Based MEMS Technology
- Resource Type
- Conference
- Authors
- Li, GuangFu; Zhao, Yong-Zhi; Gao, Yan-Hong
- Source
- 2019 International Conference on Microwave and Millimeter Wave Technology (ICMMT) Microwave and Millimeter Wave Technology (ICMMT), 2019 International Conference on. :1-3 May, 2019
- Subject
- Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
multilayer
SIW
MEMS
silicon based
filter
- Language
In this article, a novel multilayer substrate-integrated waveguide (SIW) filter is proposed. Four SIW cavities are placed in two layers based on a standard Silicon Based MEMS Structure technology. Eigenmode solution is used to improve the efficiency of design. The feed line is adapted by CPW transmission line convenient connected the monolithic microwave chip. The filter has a 55% area reduction in comparison with planar structure. Good agreement is acquired between measured and simulated results.