Fresnel Zone Plate array fabricated by maskless lithography
- Resource Type
- Conference
- Authors
- Barea, Luis A.; von Zuben, Antonio A.; Brahim, Tayeb M; Montagnoli, Arlindo N.; Hospital, Michel; Frateschi, N.; Cirino, Giuseppe A.
- Source
- 2015 30th Symposium on Microelectronics Technology and Devices (SBMicro) Microelectronics Technology and Devices (SBMicro), 2015 30th Symposium on. :1-4 Aug, 2015
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Radio frequency
Charge coupled devices
Substrates
Optical imaging
Fresnel Zone Plate
Maskless Lithography
Diffractive Optics
- Language
This work reports the fabrication of Fresnel Zone Plates (FZP) by employing a maskless lithography tool based on direct laser writing. The target application areas in this work are to use a micro lens array (MLA) in a wavefront sensor, for optical aberrations quantification in human eye diagnostics or adaptive optical system. This last one is essential in astronomy applications in order to correct the aberrations introduced by earth atmosphere. The fabricated FZP generates illumination points with high-contrast intensity in the focal plane, which is the purpose of the wavefront sensor. This high-contrast image suggests that the employed fabrication process is well controlled and it matches the design parameters.