Reliable low-cost fabrication and characterization methods for micromechanical disk resonators
- Resource Type
- Conference
- Authors
- Xie, J.; Liu, Y. F.; Zhao, H.; Yang, J. L.; Yang, F. H.
- Source
- 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. :2462-2465 Jun, 2011
- Subject
- Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Signal Processing and Analysis
Power, Energy and Industry Applications
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Robotics and Control Systems
Current measurement
Fabrication
Corrosion
Differential amplifiers
Voltage measurement
Resonator filters
Micromechanical devices
Disk resonator
differential readout
electrochemical corrosion
notch filter
polysilicon
- Language
- ISSN
- 2159-547X
2164-1641
A reliable low-cost method is developed to batch fabricate Micro-Electro-Mechanical Systems (MEMS) resonators with high yield. The key breakthrough in the fabrication process is one novel approach realized to effectively restrain electrochemical corrosion of polycrystalline silicon (polysilicon) electrically coupled with noble metals of MEMS devices by hydrofluoric acid (HF)-based solutions. In addition, this paper reports a novel measurement architecture based on a differential readout topology. The differential circuit proposed here can effectively suppress noise and feed-through current by common-mode rejection of the differential amplifier. This differential amplifier circuit configuration is also applied to build up a notch filter with high quality factor (24800).