Three-dimensional laser lithography with conceptually diffraction-unlimited lateral and axial resolution
- Resource Type
- Conference
- Authors
- Fischer, Joachim; Ergin, Tolga; von Freymann, Georg; Wegener, Martin
- Source
- CLEO: 2011 - Laser Science to Photonic Applications Lasers and Electro-Optics (CLEO), 2011 Conference on. :1-2 May, 2011
- Subject
- Photonics and Electrooptics
Optical device fabrication
Optical diffraction
Lasers
Lithography
Polymers
Photonic crystals
Ultrafast optics
- Language
- ISSN
- 2160-8989
By transferring concepts from stimulated-emission-depletion microscopy to Direct Laser Writing, we improved its lateral and axial resolution significantly. Thus, woodpile photonic crystals with 300-nm lateral rod spacing can be fabricated routinely.