Built-In Upwards-Bending Electrostatic Actuator Capable of Three-Level-Structural Variable Capacitor
- Resource Type
- Conference
- Authors
- Konishi, Hiroshi; Nishiyama, Madoka; Suzuki, Junji; Tezuka, Yasuo; Komai, Atsushi; Suzuki, Yoshihiko; Suzuki, Kenichiro
- Source
- TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International. :447-450 Jun, 2007
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Robotics and Control Systems
Signal Processing and Analysis
Electrostatic actuators
Capacitors
Radio frequency
Electrodes
Resists
Voltage
Silicon compounds
Electric variables control
Capacitance
Circuits
electrostatic actuator
multilevel structure
RF MEMS
variable capacitor
surface micromachining
- Language
- ISSN
- 2159-547X
2164-1641
We have developed a new electrostatic actuator consisting of multilevel structure, which can move in a long distance with no need of a high driving voltage. This actuator features to have a built-in upward-deflection. We have also developed a variable capacitor, which can be controlled with a Capacitance Ratio (C/R) higher than 10 using a new configuration of the actuators and capacitor plates. The overall process to make these devices is quite easy to integrate with the CMOS circuits.