An Electrothermal Micromirror Array Integrated with Thermal Convection-Based Mirror Position Sensors
- Resource Type
- Conference
- Authors
- Ren, Anrun; Ding, Yingtao; Yang, Hengzhang; Pan, Teng; Zhang, Ziyue; Xie, Huikai
- Source
- 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :170-173 Jan, 2024
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Mechanical sensors
Temperature sensors
Sensitivity
Thermistors
Sensor systems
Micromirrors
Sensor arrays
Thermal convection
micromirror array
mirror plate position sensor
- Language
- ISSN
- 2160-1968
A novel electrothermal micromirror array integrated with thermal convection-based mirror position sensors is proposed, in which a heater is integrated on the mirror plate to generate a temperature distribution that will be changed by the movement of the mirror plate. The temperature change is then picked up by the thermistors integrated on the substrate. Both the displacement and the tip-tilt angle can be detected. A 3×3 micromirror array has been successfully fabricated. Experiments show an average sensitivity value of 8.6 mV/μm in the displacement range of 50 μm to 150 μm, and an average sensitivity of 95.5 mV/° in the angular scan range of 2° to 10°.