Fabrication of Cu-doping Micro-Nano Grooved Structures on Ti6Al4V Alloy by Laser Direct Writing
- Resource Type
- Conference
- Authors
- Li, Wenjun; Zeng, Huanghao; Liu, Ri; Kong, Fanyue
- Source
- 2023 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2023 IEEE International Conference on. :267-271 Jul, 2023
- Subject
- Aerospace
Bioengineering
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
General Topics for Engineers
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Fabrication
Scanning electron microscopy
Power lasers
Surface morphology
Surface emitting lasers
Ions
Surface topography
Laser direct writing
Micro-nano grooved structures
Cu-doping
Ti6Al4V alloy
- Language
- ISSN
- 2694-510X
In this paper, the micro-nano grooved structures with a period of 70um were prepared on the surface of Ti6A14V allowy by fiber laser direct writing technology, and Cu was doped on the grooves by ion sputtering and annealing processes. The effects of laser power and scanning speed on the topography and feature size of grooved structures on Ti6A14V allowy surface were studied. The topography was characterized by scanning electron microscopy (SEM). The results showed that the micro-nano grooved structures were formed when the laser power was 12W and the scanning speed was 10mm/s. The effect of Cu doping on micro-nano grooved structures was studied by adjusting the Cu doping from 1% to 50.7% by ion sputtering. The results of elemental analysis (EDS) showed that the nanostructures were generated on the micro grooved structures when the Cu-doped content was 19.1%.