Passive Integrated Athermal (De)Multiplexers on 300 mm Silicon Photonics Wafers
- Resource Type
- Conference
- Authors
- Gao, Yun; Pestana, Noah; Deckoff-Jones, Skylar; Zheng, Jiajiu; Goldstein, Jordan; Netherton, Andrew; Shiue, Ren-Jye; Watts, Michael R.; Poulton, Christopher V.
- Source
- 2023 Optical Fiber Communications Conference and Exhibition (OFC) Optical Fiber Communications Conference and Exhibition (OFC), 2023. :1-3 Mar, 2023
- Subject
- Communication, Networking and Broadcast Technologies
Photonics and Electrooptics
Optical fibers
Power demand
Optical device fabrication
Silicon nitride
Silicon photonics
Transceivers
Robustness
- Language
We demonstrate passive integrated athermal (de)multiplexers showing near 0 pm/°C wavelength shift from 20 to 80 °C on 300 mm silicon photonics wafers. Wafer-scale data shows its high fabrication tolerance for next-generation optical transceiver systems.