In radar cross section (RCS) calculation of a rough surface, the model can be simplified into the scattering of geometrically idealized bosses on a surface. Thus the problem of the RCS calculation of a rough surface is changed to the RCS calculation of the semicircular boss. The RCS measurement of scale model can help save time and money. The utilization of terahertz in RCS is attractive because of its special properties: the wavelength of the terahertz wave can help limit the size of the model in a suitable range in the measurement of the scale model and get more detailed data in the measurement of the real object. However, usually the incident beam of a terahertz source is a Gaussian beam; in the theoretical RCS estimation, usually a plane wave is assumed as the incident beam for sake of simplicity which may lead to an error between the measurement and calculation results. In this paper, the method of images is used to calculate the RCS of a semicircular boss at 2.52 THz and the results are compared to the one calculated when the incident beam is a plane wave. [ABSTRACT FROM AUTHOR]