For the purpose to solve the problem that it is difficult for solar cells to maintain stable electrical output under high concentration ratio, this paper studies the method of combining spray cooling and solar cells. The objective of this paper is to study the effect of liquid film generated during spray cooling heat transfer on the performance of solar cells. In this paper, the model was built by ANSYS, compared with jet cooling, the solar cell integrated spray cooling has the superiority of the performance. When the angle of the nozzle is tangent to the solar cell and the nozzle height ranges from 4 mm to 6 mm, the solar cell can obtain the optimal electrical performance. Properly increasing the flow rate enables the distribution of the liquid film on the solar cell more uniform, so that the uniformity of the temperature can be better maintained. Considering the electrical properties and temperature uniformity, the combination of solar cell and spray cooling is more suitable under concentration ratio of 800. Solar cell can not only obtain more than 20W/cm2 of electrical energy, but also the temperature difference (Tsurface,max- Tsurface,min) can be kept below 10K. Above results have implications for cooling methods of solar cells in the field of high concentration photovoltaic. [ABSTRACT FROM AUTHOR]