High-quality Ge and Sn Thin Films Deposited on Si Substrate by Magnetron Sputtering.
- Resource Type
- Article
- Source
- Procedia Engineering; 2017, Vol. 215, p82-88, 7p
- Subject
MAGNETRON sputtering GERMANIUM films THIN films analysis X-ray diffraction measurement OPTOELECTRONICS CHEMICAL vapor deposition - Language
- ISSN
- 18777058