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1 . Academic Journal
SiC Epitaxial reactor cleaning by detaching SiC film / SiC膜脱離を活用したSiCエピ成長装置の短時間クリーニング
저자
by
Akio Ishiguro
;
Hideki Ito
;
Hitoshi Habuka
;
Ichiro Mizushima
;
Masaya Hayashi
, et al.
소스
JSAP Annual Meetings Extended Abstracts. 2021, :2668
Open Access (JSTAGE)
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7 . Academic Journal
4H-SiC(0001)表面近傍における炭素空孔の取り込みやすさの解析 / Analysis of ease of incorporating carbon vacancies near the surface of 4H-SiC(0001)
저자
by
Hibiki Nakashima
;
Ichiro Mizushima
;
Kenji Shiraishi
;
Kenta Chokawa
;
Takashi Yoda
, et al.
소스
JSAP Annual Meetings Extended Abstracts. 2020, :2149
Open Access (JSTAGE)
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7 . Academic Journal
Rapid Cleaning of SiC CVD Reactor Using ClF3 Gas / 三フッ化塩素ガスを用いた炭化珪素CVD装置高速クリーニング法
저자
by
Akio Ishiguro
;
Hideki Ito
;
Hitoshi Habuka
;
Ichiro Mizushima
;
Masaya Hayashi
, et al.
소스
JSAP Annual Meetings Extended Abstracts. 2020, :2131
Open Access (JSTAGE)
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7 . Academic Journal
HCl環境下でのSiC CVD成長における気相反応と表面構造の予測 / Prediction of gas phase reactions and surface structures under the CVD process of SiC with HCl gas
저자
by
Ichiro Mizushima
;
Kenji Shiraishi
;
Kenta Chokawa
;
Takashi Yoda
;
Yoshiaki Daigo
, et al.
소스
JSAP Annual Meetings Extended Abstracts. 2020, :3152
Open Access (JSTAGE)
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7 . Academic Journal
Simulation of a GaN MOVPE Process in a Vertical Crystal Growth Apparatus / 縦型結晶成長装置におけるGaN MOVPEシミュレーション
저자
by
Akira Kusaba
;
Ichiro Mizushima
;
Katsunori Yoshimatsu
;
Kenji Shiraishi
;
Kento Kawakami
, et al.
소스
JSAP Annual Meetings Extended Abstracts. 2019, :3152
Open Access (JSTAGE)
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7 . Academic Journal
Design of a Silicon Carbide Chemical Vapor Deposition Reactor Cleaning Process Using Chlorine Trifluoride Gas Accounting for Exothermic Reaction Heat.
저자
by
Masaya Hayashi
;
Takumi Mamyouda
;
Hitoshi Habuka
;
Akio Ishiguro
;
Shigeaki Ishii
, et al.
소스
ECS Journal of Solid State Science & Technology; 2020, Vol. 9 Issue 10, p1-6, 6p
Full Text (IOP)
Web of Science
Scopus
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7 .
Influence and Suppression of Harmful Effects Due to By-Product in CVD Reactor for 4H-SiC Epitaxy
저자
by
Akio Ishiguro
;
Shigeaki Ishii
;
Yoshiaki Daigo
;
Yoshikazu Moriyama
;
Toru Watanabe
.
소스
IEEE Transactions on Semiconductor Manufacturing
. 34:340-345
Full Text (IEEE)
Open Access (OpenAIRE)
Web of Science
Scopus
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7 .
Recovery Method of Pyrolytic Carbon Surface after Exposure to Chlorine Trifluoride Gas
저자
by
Akio Ishiguro
;
Hitoshi Habuka
;
Hideki Ito
;
Yoshiaki Daigo
;
Masaya Hayashi
, et al.
소스
Advances in Chemical Engineering and Science
. 11:65-76
Open Access (OpenAIRE)
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7 .
Improvement of Repeatability on N-Type 4H-SiC Epitaxial Growth by High Speed Wafer Rotation Vertical CVD Tool
저자
by
Akio Ishiguro
;
Shigeaki Ishii
;
Takehiko Kobayashi
;
Yoshikazu Moriyama
;
Yoshiaki Daigo
.
소스
Materials Science Forum
. 1004:78-83
Scopus
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7 .
Origin of Large Bumps Abnormally Grown on 4H-SiC Epitaxial Film by Adding HCl Gas with High Cl/Si Ratio in CVD Process
저자
by
Yoshiaki Daigo
;
Akio Ishiguro
.
소스
Materials Science Forum
. 1004:91-95
Scopus
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