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1 . Academic Journal
On Middle-School Districts fron1 1942 to 1946 in Japan. / 戦時下における 中等学校学区制導入の意義
저자
by
Yasutaka MORIKAWA
;
森川 恭厳
.
소스
甲子園短期大学紀要 / Journal of Koshien Junior College. 1970, 2:71
Open Access (JSTAGE)
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4 . Conference
Mask 3D effect reduction and defect printability of etched multilayer EUV mask.
저자
by
Takashi Kamo
;
Takeshi Yamane
;
Yasutaka Morikawa
;
Susumu Iida
;
Takayuki Uchiyama
, et al.
소스
Proceedings of SPIE; 1/20/2019, Vol. 10957, p109571C-1-109571C-6, 6p
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7 . Conference
Influence of mask line width roughness on programmed pattern defect printability.
저자
by
Takeshi Yamane
;
Yasutaka Morikawa
;
Takashi Kamo
.
소스
Proceedings of SPIE; 1/20/2019, Vol. 10957, p109570M-1-109570M-6, 6p
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5 . Conference
Blank Defect Coverage Budget For 16nm Half-Pitch Single EUV Exposure.
저자
by
Rik Jonckheere
;
Takeshi Yamane
;
Yasutaka Morikawa
;
Takashi Kamo
.
소스
Proceedings of SPIE; 8/23/2018, Vol. 10807, p1-8, 8p
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6 . Conference
Fabrication of Ta based absorber EUV mask with SRAF.
저자
by
Keiko Morishita
;
Kosuke Takai
;
Kenji Masui
;
Takashi Kamo
;
Tsukasa Abe
, et al.
소스
Proceedings of SPIE; 8/23/2018, Vol. 10807, p1-6, 6p
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7 .
Mask 3D effect reduction and defect printability of etched multilayer EUV mask
저자
by
Shunko Magoshi
;
Satoshi Tanaka
;
Susumu Iida
;
Takashi Kamo
;
Takayuki Uchiyama
, et al.
소스
Extreme Ultraviolet (EUV) Lithography X
.
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7 .
Lithographic performance of a new 'low-k' mask
저자
by
Ayako Tani
;
Takashi Adachi
;
Katsuya Hayano
;
Yukihiro Fujimura
;
Yukio Inazuki
, et al.
소스
SPIE Proceedings
.
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7 .
Etched multilayer EUV mask fabrication for sub-60nm pattern based on effective mirror width
저자
by
Kosuke Takai
;
Noriko Iida
;
Yasutaka Morikawa
;
Naoya Hayashi
;
Takashi Kamo
.
소스
SPIE Proceedings
.
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7 .
Etched-multilayer black border formed on EUV mask: Does it cause image degradation during pattern inspection using EB optics?
저자
by
Hidehiro Watanabe
;
Yasutaka Morikawa
;
Tsukasa Abe
;
Ryoichi Hirano
;
Tsuyoshi Amano
, et al.
소스
Extreme Ultraviolet (EUV) Lithography VII
.
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7 .
Process capability of etched multilayer EUV mask
저자
by
Noriko Iida nee Sakurai
;
Kosuke Takai
;
Yasutaka Morikawa
;
Takashi Kamo
;
Naoya Hayashi
.
소스
SPIE Proceedings
.
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