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1 . Conference
Novel lithography approach using feed-forward mask-based wafer CDU correction increase fab productivity and yield.
저자
by
Mangan, Shmoolik
;
Byers, Erik
;
Rost, Dan
;
Garrett, Mike
;
Carlson, Merri
, et al.
소스
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72722B-72722B-12, 12p
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7 . Conference
OPC cycle time reduction and accuracy improvement by early access to advanced Tachyon modeling of TWINSCAN XT:1900i scanner.
저자
by
Nikolsky, Peter
;
Nooitgedagt, Tjitte
;
van Adrichem, Paul
;
Meessen, Jeroen
;
Kohler, Carsten
, et al.
소스
Proceedings of SPIE; Nov2008, Issue 1, p712249-712249-11, 11p
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7 . Periodical
Mixed-mode, high-order multi-patterning control strategy with small-spot, optical CD metrology on device structures
저자
by
Sanchez, Martha I.
;
Ukraintsev, Vladimir A.
;
Cramer, Hugo
;
Wisse, Baukje
;
Kruijswijk, Stefan
, et al.
소스
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97782E-97782E-10, 9680429p
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7 . Periodical
Spacer multi-patterning control strategy with optical CD metrology on device structures
저자
by
Sanchez, Martha I.
;
Ukraintsev, Vladimir A.
;
Lee, Jongsu
;
Lee, Byoung-Hoon
;
Ma, Won-Kwang
, et al.
소스
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97782B-97782B-11, 9680430p
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7 . Periodical
Intra-field patterning control using high-speed and small-target optical metrology of CD and focus
저자
by
Cain, Jason P.
;
Sanchez, Martha I.
;
Cramer, Hugo
;
Petra, Stefan
;
Fagginger Auer, Bastiaan Onne
, et al.
소스
Proceedings of SPIE; March 2015, Vol. 9424 Issue: 1 p94241F-94241F-10, 9329870p
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7 . Periodical
Integrated ADI optical metrology solution for lithography process control of CD and OV
저자
by
Cain, Jason P.
;
Sanchez, Martha I.
;
Strobl, Marlene
;
Tsai, Wilhelm
;
Lan, Andy
, et al.
소스
Proceedings of SPIE; April 2014, Vol. 9050 Issue: 1 p90501J-90501J-10, 8959610p
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7 . Periodical
High speed optical metrology solution for after etch process monitoring and control
저자
by
Cain, Jason P.
;
Sanchez, Martha I.
;
Charley, Anne-Laure
;
Leray, Philippe
;
Pypen, Wouter
, et al.
소스
Proceedings of SPIE; April 2014, Vol. 9050 Issue: 1 p90501H-90501H-9, 814519p
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7 . Periodical
OPC Accuracy and Development Time Improvement for Advanced Technology Nodes
저자
by
Nikolsky, Peter
;
Nooitgedagt, Tjitte
;
Van, Paul
;
Meessen, Jeroen
;
Kohler, Carsten
, et al.
소스
ECS Transactions; March 2009, Vol. 18 Issue: 1 p357-366, 10p
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