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1 . Conference
Scanner and etch co-optimized corrections for better overlay and CD control.
저자
by
Ik-Hyun Jeong
;
Seung-Woo Koo
;
Hyun-Sok Kim
;
Jae-Wuk Ju
;
Young-Sik Kim
, et al.
소스
Proceedings of SPIE; 2/16/2019, Vol. 10984, p1-7, 7p
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7 . Conference
Ultimate edge-placement control using combined etch and lithography system optimizations.
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by
Peterson, Brennan
;
Wise, Rich
;
van der Straten, Koen
;
Viatkina, Katja
;
Luca, Melisa
, et al.
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Proceedings of SPIE; 1/14/2018, Vol. 10586, p1-8, 8p
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7 . Periodical
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections
저자
by
Erdmann, Andreas
;
Kye, Jongwook
;
Kubis, Michael
;
Wise, Rich
;
Chahine, Charlotte
, et al.
소스
Proceedings of SPIE; March 2017, Vol. 10147 Issue: 1 p101470H-101470H-9, 913240p
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7 . Periodical
Influence of etch process on contact hole local critical dimension uniformity in extreme-ultraviolet lithography
저자
by
Wallow, Thomas I.
;
Hohle, Christoph K.
;
Lorusso, Gian F.
;
Mao, Ming
;
Reijnen, Liesbeth
, et al.
소스
Proceedings of SPIE; March 2015, Vol. 9425 Issue: 1 p94250K-94250K-9, 848260p
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7 . Periodical
Scanner and etch co-optimized corrections for better overlay and CD control
저자
by
Wise, Richard S.
;
Labelle, Catherine B.
;
Jeong, Ik-Hyun
;
Koo, Seung-Woo
;
Kim, Hyun-Sok
, et al.
소스
Proceedings of SPIE; March 2019, Vol. 10963 Issue: 1 p1096308-1096308-7
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7 . Periodical
Integrated approach to improving local CD uniformity in EUV patterning
저자
by
Panning, Eric M.
;
Goldberg, Kenneth A.
;
Liang, Andrew
;
Hermans, Jan
;
Tran, Timothy
, et al.
소스
Proceedings of SPIE; April 2017, Vol. 10143 Issue: 1 p1014319-1014319-15
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7 . Periodical
Ultimate intra-wafer critical dimension uniformity control by using lithography and etch tool corrections
저자
by
Erdmann, Andreas
;
Kye, Jongwook
;
Kubis, Michael
;
Wise, Rich
;
Reijnen, Liesbeth
, et al.
소스
Proceedings of SPIE; March 2016, Vol. 9780 Issue: 1 p978007-978007-8
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