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1 . Academic Journal
掩模材料与新颖的衬底方案关键问题及新的良机 / Mask Materials and Novel Blanks -Solutions, Critical Issues and New Opportunities
저자
by
Ute Buttgereit
;
Holger Seitz
;
Guenter Hess
;
Patrick M. Martin
.
소스
电子工业专用设备 / EQUIPMENT FOR ELECTRONIC PRODUCTS MANUFACTURING
. 35(4):23-30
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6 .
Improving ORC methods and hotspot detection with the usage of aerial image metrology
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by
Thomas Thaler
;
Thomas Zeuner
;
Francois Weisbuch
;
Ute Buttgereit
;
Christian Stötzel
.
소스
Optical Microlithography XXXIII
.
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7 .
Automated defect disposition with AIMS AutoAnalysis
저자
by
Vahagn Sargsyan
;
Kay Dornbusch
;
Ute Buttgereit
;
David Jenkins
;
Guy Russell
, et al.
소스
Photomask Technology
.
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7 .
Aerial image metrology for OPC modeling and mask qualification
저자
by
Angeline Chung
;
Thomas Thaler
;
Ao Chen
;
Andrew Burbine
;
Chris Clifford
, et al.
소스
33rd European Mask and Lithography Conference
.
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7 .
Effective use of aerial image metrology for calibration of OPC models
저자
by
Ao Chen
;
Ute Buttgereit
;
Thomas Thaler
;
Chris Clifford
;
Yee Mei Foong
, et al.
소스
SPIE Proceedings
.
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7 .
Automated hotspot analysis with aerial image CD metrology for advanced logic devices
저자
by
Gary Meyers
;
Jung-Uk Seo
;
Thomas Trautzsch
;
Min-ho Kim
;
Dong-Hoon Chung
, et al.
소스
SPIE Proceedings
.
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7 .
Improving wafer level CD uniformity for logic applications utilizing mask level metrology and process
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by
Avi Cohen
;
Erez Graitzer
;
Thomas Trautzsch
;
Ori Hanuka
;
Ute Buttgereit
.
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SPIE Proceedings
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7 .
A study of closed-loop application for logic patterning
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by
Shingo Yoshikawa
;
Hidemichi Imai
;
Thomas Thaler
;
Ute Buttgereit
;
Hideyoshi Takamizawa
.
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SPIE Proceedings
.
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7 .
Mask CD uniformity metrology for logic patterning and its correlation to wafer data
저자
by
Raphaël Zékri
;
Ute Buttgereit
;
Thomas Thaler
;
Robert Birkner
;
Frank Sundermann
, et al.
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SPIE Proceedings
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7 .
A study of closed-loop application: WLCD-CDC for 32nm and beyond reticles
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by
Arosha Goonesekera
;
Ute Buttgereit
;
Thomas Thaler
;
Erez Graitzer
.
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SPIE Proceedings
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