handbook of silicon based mems materials and technologies (7)
ecs transactions (4)
mrs online proceedings library (4)
ecs journal of solid state science and technology (3)
ieee journal of solid-state circuits (2)
solid-state electronics (2)
2012 3rd ieee international workshop on low temperature bonding for 3d integration (1)
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2013 8th international microsystems, packaging, assembly & circuits technology conference (impact) (1)
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2013 ieee international solid-state circuits conference digest of technical papers (1)
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2015 symposium on design, test, integration & packaging of mems/moems (dtip) (1)
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2016 symposium on design, test, integration and packaging of mems/moems (dtip), design, test, integration and packaging of mems/moems (dtip), 2016 symposium on (1)
ecs journal of solid state science & technology (1)
microsystem technologies (1)
microsystem technologies: mems, systems for information processing and storage (1)
solid state electronics (1)