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1 . Academic Journal
Reduction of Critical Dimension Difference in Litho-Etch-Litho- Etch Double Patterning Process
저자
by
Andrew Metz
;
Hao Tang
;
Jeffrey C. Shearer
;
John C. Arnold
;
Karen Petrillo
, et al.
소스
Journal of Photopolymer Science and Technology. 2015, 28(1):13
Open Access (JSTAGE)
Web of Science
Scopus
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7 .
Focus considerations of design pitches and absorber choice for EUV random logic
저자
by
Martin Burkhardt
;
Zheng G. Chen
;
Scott Halle
;
Romain J. Lallement
;
Stuart A. Sieg
, et al.
소스
Optical and EUV Nanolithography XXXV
.
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7 .
The road towards aggressive pitch scaling with single exposure EUV
저자
by
Anuja De Silva
;
Romain Lallement
;
Dario L. Goldfarb
;
Jennifer Church
;
Karen Petrillo
, et al.
소스
Extreme Ultraviolet (EUV) Lithography XII
.
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7 .
Performance of stacked nanosheet gate all around FET’s with EUV patterned gate and sheets
저자
by
Tao Li
;
Chris A. Mack
;
Frougier Julien
;
Andrew M. Greene
;
Daniel J. Dechene
, et al.
소스
Extreme Ultraviolet (EUV) Lithography XII
.
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7 .
In-depth feasibility study of extreme ultraviolet damascene extension: Patterning, dielectric etch, and metallization
저자
by
Xinghua Sun
;
Yann Mignot
;
Christopher Cole
;
Eric Liu
;
Daniel Santos
, et al.
소스
Journal of Vacuum Science & Technology B
. 40:023207
Web of Science
Scopus
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7 .
A comparative analysis of EUV sheet and gate patterning for beyond 7nm gate all around stacked nanosheet FET’s (Conference Presentation)
저자
by
Pietro Montanini
;
Stuart A. Sieg
;
Andrew M. Greene
;
Nelson Felix
;
Xu Wenyu
, et al.
소스
Design-Process-Technology Co-optimization for Manufacturability XIV
.
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7 .
EUVL mask process development and verification using advanced modeling and characterization techniques
저자
by
Stuart A. Sieg
;
Mohamed Ramadan
;
Michael Green
;
Romain Lallement
;
Henry Kamberian
, et al.
소스
Extreme Ultraviolet (EUV) Lithography XI
.
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7 .
Reduction of Critical Dimension Difference in Litho-Etch-Litho- Etch Double Patterning Process
저자
by
Lin Lee Cheong
;
Jeffrey C. Shearer
;
Andrew Metz
;
John C. Arnold
;
Nicole Saulnier
, et al.
소스
Journal of Photopolymer Science and Technology
. 28:13-16
Open Access (OpenAIRE)
Web of Science
Scopus
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7 .
Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET
저자
by
Nelson Felix
;
Spyridon Skordas
;
Rohit Galatage
;
Junli Wang
;
Dinesh Gupta
, et al.
소스
2017 Symposium on VLSI Technology
.
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7 .
An OCD perspective of line edge and line width roughness metrology
저자
by
Stuart A. Sieg
;
Ravi K. Bonam
;
Nicole Saulnier
;
Chi-Chun Liu
;
Raghuveer R. Patlolla
, et al.
소스
SPIE Proceedings
.
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