2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :135-138 Jun, 2017
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on. :91-94 Jan, 2017
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on. :535-538 Jan, 2015