2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. :1029-1032 Jan, 2012
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. :333-336 Jan, 2012
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. :882-885 Jan, 2012
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :103-106 Jan, 2011