Journal of Microelectromechanical Systems, vol 27, iss 6 Noor, Radwan M; & Shkel, Andrei M. (2018). MEMS Components for NMR Atomic Sensors. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 27(6), 1148-1159. doi: 10.1109/JMEMS.2018.2874451. UC Irvine: Retrieved from: http://www.escholarship.org/uc/item/49v0b9js