Chemistry of Materials Chemistry of Materials, 2020, 32 (12), pp.5153-5161. ⟨10.1021/acs.chemmater.0c01148⟩ Chemistry of Materials, American Chemical Society, 2020, 32 (12), pp.5153-5161. ⟨10.1021/acs.chemmater.0c01148⟩
Journal of Vacuum Science & Technology A Journal of Vacuum Science & Technology A, 2021, 39 (3), pp.030402. ⟨10.1116/6.0000969⟩ Journal of Vacuum Science and Technology A Journal of Vacuum Science and Technology A, American Vacuum Society, 2021, 39 (3), pp.030402. ⟨10.1116/6.0000969⟩
Journal of Vacuum Science & Technology A Journal of Vacuum Science & Technology A, 2021, 39 (1), pp.012410. ⟨10.1116/6.0000655⟩ Journal of Vacuum Science and Technology A Journal of Vacuum Science and Technology A, American Vacuum Society, 2021, 39 (1), pp.012410. ⟨10.1116/6.0000655⟩
Advanced Etch Technology and Process Integration for Nanopatterning X (SPIE) 2021 Advanced Etch Technology and Process Integration for Nanopatterning X (SPIE) 2021, 2021, conference virtuelle, France
Journal of Vacuum Science and Technology A Journal of Vacuum Science and Technology A, American Vacuum Society, 2020, 38 (3), pp.033007. ⟨10.1116/1.5140841⟩ Journal of Vacuum Science & Technology A Journal of Vacuum Science & Technology A, 2020, 38 (3), pp.033007. ⟨10.1116/1.5140841⟩