Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2019, 461, pp.191-196. ⟨10.1016/j.nimb.2019.09.041⟩ Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2019, 461, pp.191-196. ⟨10.1016/j.nimb.2019.09.041⟩