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2020 ieee 33rd international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2020 ieee 33rd international conference on (5)
small (5)
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2017 19th international conference on solid-state sensors, actuators and microsystems (transducers), solid-state sensors, actuators and microsystems (transducers), 2017 19th international conference on (3)
2019 20th international conference on solid-state sensors, actuators and microsystems & eurosensors xxxiii (transducers & eurosensors xxxiii), solid-state sensors, actuators and microsystems & eurosensors xxxiii (transducers & eurosensors xxxiii), 2019 20th international conference on (3)
journal of micromechanics and microengineering (3)
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sensors & actuators b: chemical (3)
sensors and actuators: b. chemical (3)
2021 ieee 34th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2021 ieee 34th international conference on (2)
2023 ieee 36th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2023 ieee 36th international conference on (2)
2024 ieee 37th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2024 ieee 37th international conference on (2)
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aip advances (2)
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materials (1996-1944) (2)
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2006 1st ieee international conference on nano/micro engineered and molecular systems, nano/micro engineered and molecular systems, 2006. nems '06. 1st ieee international conference on (1)
2010 ieee 5th international conference on nano/micro engineered and molecular systems, nano/micro engineered and molecular systems (nems), 2010 5th ieee international conference on (1)
2010 ieee sensors, sensors, 2010 ieee (1)
2011 6th ieee international conference on nano/micro engineered and molecular systems, nano/micro engineered and molecular systems (nems), 2011 ieee international conference on (1)
2016 ieee sensors, sensors, 2016 ieee (1)
2019 china semiconductor technology international conference (cstic), china semiconductor technology international conference (cstic), 2019 (1)
2019 ieee 32nd international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2019 ieee 32nd international conference on (1)
2021 21st international conference on solid-state sensors, actuators and microsystems (transducers), ssolid-state sensors, actuators and microsystems (transducers), 2021 21st international conference on (1)
acs sensors (1)
biomedical materials (17486041) (1)
ecs journal of solid state science & technology (1)
frontiers of electrical & electronic engineering in china (1)
ieee transactions on device and materials reliability (1)
ieee transactions on electron devices (1)
international journal of rock mechanics and mining sciences (1)
materials (1)
microsystem technologies: micro- and nanosystemsinformation storage and processing systems (1)
microsystem technologies-micro-and nanosystems-information storage and processing systems (1)
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sensors & actuators: a. physical (1)
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