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1 . Periodical
Simulating SEM imaging of via bottoms
저자
by
Sendelbach, Matthew J.
;
Schuch, Nivea G.
;
Bunday, Benjamin D.
;
Mack, Chris
;
Klotzkin, Shari
, et al.
소스
Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129551T-129551T-13, 12825563p
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7 . Academic Journal
Automatic calibration of lithography simulation parameters using multiple data sets
저자
by
Byers, Jeffrey
;
Mack, Chris
;
Huang, Richard
;
Jug, Sven
.
소스
In
Microelectronic Engineering
2002 61:89-95
Full Text (ScienceDirect)
Web of Science
Scopus
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6 . Periodical
Spatial frequency analysis of LER and LWR to tune SADP process
저자
by
Robinson, John C.
;
Sendelbach, Matthew J.
;
Yang, Jason
;
Mack, Chris
;
Freed, Regina
.
소스
Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p120531J-120531J-4, 1084784p
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7 . Periodical
Low-voltage aberration-corrected SEM metrology of thin resist for high-NA EUVL
저자
by
Robinson, John C.
;
Sendelbach, Matthew J.
;
Zidan, Mohamed
;
Fischer, Daniel
;
Lorusso, Gian Francesco
, et al.
소스
Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p120530P-120530P-12, 11932483p
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7 . Periodical
Metrology of thin resist for high NA EUVL
저자
by
Robinson, John C.
;
Sendelbach, Matthew J.
;
Lorusso, Gian Francesco
;
Beral, Christophe
;
Bogdanowicz, Janusz
, et al.
소스
Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p120530O-120530O-12, 11932483p
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7 . Conference
Roughness Power Spectral Density as a Function of Aerial Image and Basic Process / Resist Parameters.
저자
by
Cutler, Charlotte
;
Choong-Bong Lee
;
Thackeray, James W.
;
Trefonas, Peter
;
Nelson, John
, et al.
소스
Proceedings of SPIE; 1/23/2019, Vol. 10960, p1-19, 19p
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7 . Academic Journal
Investigation of microstructured milling tool for deferring tool wear
저자
by
Chang, Wenlong
;
Sun, Jining
;
Luo, Xichun
;
Ritchie, James M.
;
Mack, Chris
.
소스
In
Wear
2011 271(9):2433-2437
Full Text (ScienceDirect)
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7 . Conference
Benchmarking of EUV lithography line/space patterning versus immersion lithography multipatterning schemes at equivalent pitch.
저자
by
Raley, Angélique
;
Mack, Chris
;
Thibaut, Sophie
;
Liu, Eric
;
Akiteru Ko
.
소스
Proceedings of SPIE; 8/25/2018, Vol. 10809, p1080915-1-1080915-19, 19p
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7 . Periodical
Roughness study on line and space patterning with chemo-epitaxy directed self-assembly
저자
by
Gronheid, Roel
;
Sanders, Daniel P.
;
Suh, Hyo Seon
;
Dudash, Viktor
;
Lorusso, Gian
, et al.
소스
Proceedings of SPIE; May 2020, Vol. 11326 Issue: 1 p113260X-113260X-9, 1019350p
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7 . Periodical
Fundamental characterization of stochastic variation for improved single-expose EUV patterning at aggressive pitch
저자
by
Felix, Nelson M.
;
Lio, Anna
;
Church, Jennifer
;
Meli, Luciana
;
Guo, Jing
, et al.
소스
Proceedings of SPIE; March 2020, Vol. 11323 Issue: 1 p113230O-113230O-9, 1019080p
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