공지
원문복사·상호대차 이용안내
2024-1학기 도서관 프로그램 안내
특별회원 도서대출제도 변경 및 예치금 반환 안내
이전
다음
Close today
공지사항 닫기
DAU Library
Central Library
Dong-A University
LOGIN
Off-Campus Access
OFF
KO
Open the search box
Search"
Search
All
Library Catalog
eArticles
eJournals
Databases
e-Learning
e-Learning
INSPIRE
KOCW
Overseas OCW/MOOC List
eBooks
Collections
New Arrivals(Subject)
Popular Books
Recommendations
DAU Reading List
Book Gallery
Research book
Research Support
Journal Evaluation
Subject Guides
Plagiarism Prevention
Plagiarism Prevention
Research Ethics
References Management
Thesis Submission
Document Delivery Service/Interlibrary Loan
Document Delivery Service/Interlibrary Loan
Medicine, Nursing(Request_Journal)
Medicine, Nursing(Request_Thesis)
DDS/ILL – Request list
Library Instruction
Library Instruction Guide
Library Instruction Request
Group Instruction Request
Libaray Services
Use Using Materials
Borrow/Renew/Return
Inter-Campus Loan
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
Facilities
Group Study Room
Group Study Room Request
Reading Room
Visit Other Libraries(Data)
Visit Other Libraries for Material Use
Visit Other Libraries Request(Data)
Request History (Material Use)
Visit Other Libraries(Reading Room)
Visit Other Libraries Guide(Reading Room)
Visit Other Libraries Request(Reading Room)
Request History (Reading Room)
User Guide
Undergraduates
Graduates students
Faculty/Staff
Special member
Etc.
Mobile Service
Mobile Web
Mobile Seat Allocation
Mobile ID Card
WiFi
Off-Campus Access
Find Services
About our Library
Overview
Overview
History
Status
Regulations
Organization/Staff
Library Hours
Floor Guide
Donations
How to Donate
List
Cyber Memorial Collection
Directions
Community
Notice
Notice(Datebases)
Q&A
Q&A
FAQ
Book Reviews
Best Reviews
Program Feedback
Forms
Error Inquiry
My Library
Borrow/Renew
Borrow/Renew
History
Inter-Campus Loan List
My Request List
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
DDS – Request List
Group Study Room
Library Instruction
My Shelf
My Book Reviews
Personal Information
Profile
Notice
Quick Menu
My Shelf
Error Inquiry
메뉴 전체보기
eArticles
Home
>
Search
>
eArticles
>
All
Library Catalog
eArticles
eJournals
전체
ISSN
논문 제목
Journal Title
저자
발행년도
-
(ex : 2010-2015)
'
학술논문
' 에서의 검색결과
22
건 | List
1~10
Select All
Relevance
Date Newest
Date Oldest
5
10
20
30
40
50
E-Mail
EndNote
RefWorks
1 . Conference
Improved Cycle Time of CDSEM Measurements Through Novel Alignment Methodologies & Data Storage Optimization
저자
by
Brown, Robert
;
Power, Carmen
;
Pike, Ellen
;
Lenahan, Michael
.
소스
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2023 34th Annual. :1-6 May, 2023
Full Text (IEEE)
요약보기
Export
E-Mail
EndNote
RefWorks
6 . Conference
Metrology manufacturing control factors: A holistic approach for supporting 14nm and 7nm
저자
by
Jayez, David
;
Vaid, Alok
;
Solecky, Eric
;
Lenahan, Michael
;
Dixit, Dhairya
, et al.
소스
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2017 28th Annual SEMI. :40-44 May, 2017
Full Text (IEEE)
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
Manufacturing excellence using multi-platform ellipsometry thickness measurement fleet on advanced nodes
저자
by
Lenahan, Michael
;
Vaid, Alok
;
Mahendrakar, Sridhar
;
Seipp, Steven
;
Jayez, David
, et al.
소스
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2016 27th Annual SEMI. :30-36 May, 2016
Full Text (IEEE)
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
Addressing thin film thickness metrology challenges of 14nm BEOL layers
저자
by
Zhiming Jiang
;
Haupt, Ronny
;
Ygartua, Carlos
;
Vaid, Alok
;
Lenahan, Michael
, et al.
소스
25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI. :257-260 May, 2014
Full Text (IEEE)
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Academic Journal
Measuring self-aligned quadruple patterning pitch walking with scatterometry-based metrology utilizing virtual reference.
저자
by
Kagalwala, Taher
;
Vaid, Alok
;
Mahendrakar, Sridhar
;
Lenahan, Michael
;
Fang Fang
, et al.
소스
Journal of Micro/Nanolithography, MEMS & MOEMS
. Oct-Dec2016, Vol. 15 Issue 4, p1-7. 7p.
Web of Science
Scopus
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Periodical
Optical metrology strategies for inline 7nm CMOS logic product control
저자
by
Sanchez, Martha I.
;
Ukraintsev, Vladimir A.
;
Lenahan, Michael
;
Mahendrakar, Sridhar
;
Vaid, Alok
, et al.
소스
Proceedings of SPIE; March 2017, Vol. 10145 Issue: 1 p101451D-101451D-12, 10043662p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Periodical
Scatterometry-based metrology for SAQP pitch walking using virtual reference
저자
by
Sanchez, Martha I.
;
Ukraintsev, Vladimir A.
;
Kagalwala, Taher
;
Vaid, Alok
;
Mahendrakar, Sridhar
, et al.
소스
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97781W-97781W-7, 880037p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Periodical
Optical metrology solutions for 10nm films process control challenges
저자
by
Sanchez, Martha I.
;
Ukraintsev, Vladimir A.
;
Mahendrakar, Sridhar
;
Vaid, Alok
;
Venkataraman, Kartik
, et al.
소스
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97780Z-97780Z-14, 9680235p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Periodical
Hybrid enabled thin film metrology using XPS and optical
저자
by
Sanchez, Martha I.
;
Ukraintsev, Vladimir A.
;
Vaid, Alok
;
Iddawela, Givantha
;
Mahendrakar, Sridhar
, et al.
소스
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97780M-97780M-11, 9680232p
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Patent
저자
by
Keller, Arik
;
Howard, Dane
;
Lenahan, Michael
;
Mitchell, Ben
.
소스
Open Access (USPTO)
Find it @ DONGA
요약보기
Export
E-Mail
EndNote
RefWorks
1
2
3
Next
메일 발송
로그인후 이용해주세요.
이동하기
Full menu
Close full menu
Search
All
Library Catalog
eArticles
eJournals
Databases
e-Learning
e-Learning
INSPIRE
KOCW
Overseas OCW/MOOC List
eBooks
Collections
New Arrivals(Subject)
Popular Books
Recommendations
DAU Reading List
Book Gallery
Research book
Research Support
Journal Evaluation
Subject Guides
Plagiarism Prevention
Plagiarism Prevention
Research Ethics
References Management
Thesis Submission
Document Delivery Service/Interlibrary Loan
Document Delivery Service/Interlibrary Loan
Medicine, Nursing(Request_Journal)
Medicine, Nursing(Request_Thesis)
DDS/ILL – Request list
Library Instruction
Library Instruction Guide
Library Instruction Request
Group Instruction Request
Libaray Services
Use Using Materials
Borrow/Renew/Return
Inter-Campus Loan
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
Facilities
Group Study Room
Group Study Room Request
Reading Room
Visit Other Libraries(Data)
Visit Other Libraries for Material Use
Visit Other Libraries Request(Data)
Request History (Material Use)
Visit Other Libraries(Reading Room)
Visit Other Libraries Guide(Reading Room)
Visit Other Libraries Request(Reading Room)
Request History (Reading Room)
User Guide
Undergraduates
Graduates students
Faculty/Staff
Special member
Etc.
Mobile Service
Mobile Web
Mobile Seat Allocation
Mobile ID Card
WiFi
Off-Campus Access
Find Services
About our Library
Overview
Overview
History
Status
Regulations
Organization/Staff
Library Hours
Floor Guide
Donations
How to Donate
List
Cyber Memorial Collection
Directions
Community
Notice
Notice(Datebases)
Q&A
Q&A
FAQ
Book Reviews
Best Reviews
Program Feedback
Forms
Error Inquiry
My Library
Borrow/Renew
Borrow/Renew
History
Inter-Campus Loan List
My Request List
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
DDS – Request List
Group Study Room
Library Instruction
My Shelf
My Book Reviews
Personal Information
Profile
Notice