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1 . Periodical
Study on restricting factors of practical k1 limit in 0.33NA EUV lithography
저자
by
Panning, Eric M.
;
Goldberg, Kenneth A.
;
Koo, Sunyoung
;
Lim, Mijung
;
Lee, Inhwan
, et al.
소스
Proceedings of SPIE; April 2017, Vol. 10143 Issue: 1 p101431B-101431B-8, 912888p
Find it @ DONGA
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7 . Conference
EUV-patterning characterization using a 3D mask simulation and field EUV scanner.
저자
by
Park, Jun-Taek
;
Hyun, Yoon-Suk
;
Lim, Chang-Moon
;
Eom, Tae-Seung
;
Koo, Sunyoung
, et al.
소스
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72711G-72711G-10, 10p
Find it @ DONGA
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7 . Conference
Comparative study of DRAM cell patterning between ArF immersion and EUV lithography.
저자
by
Eom, Tae-Seung
;
Park, Sarohan
;
Park, Jun-Taek
;
Lim, Chang-Moon
;
Koo, Sunyoung
, et al.
소스
Proceedings of SPIE; Nov2009, Issue 1, p727115-727115-10, 10p
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7 . Conference
Comparative study of binary intensity mask and attenuated phase shift mask using hyper-NA immersion lithography for sub-45nm era.
저자
by
Eom, Tae-Seung
;
Park, Jun-Taek
;
Kang, Jung-Hyun
;
Park, Sarohan
;
Koo, Sunyoung
, et al.
소스
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69240H-69240H-10, 10p
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7 . Conference
Application of scatterometry to measure organic material profile.
저자
by
Koo, Sunyoung
;
Ban, Keundo
;
Lim, Chang-moon
;
Bok, Cheolkyu
;
Moon, Seung-Chan
, et al.
소스
Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61522T-61522T-9, 9p
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7 . Conference
Vertical Alignment of Single-Walled Carbon Nanotubes on Chemically Functionalized Silicon Substrates.
저자
by
Lee, Ha-Jin
;
Park, Hyeyoung
;
Koo, Sunyoung
;
Lee, Haiwon
.
소스
MRS Online Proceedings Library; 2002, Vol. 739 Issue 1, p1-6, 6p
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6 . Periodical
Extension of practical k1 limit in EUV lithography
저자
by
Panning, Eric M.
;
Goldberg, Kenneth A.
;
Park, Sarohan
;
Lee, Inwhan
;
Koo, Sunyoung
, et al.
소스
Proceedings of SPIE; March 2016, Vol. 9776 Issue: 1 p97761Q-97761Q-7, 879857p
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7 . Academic Journal
Fabrication of nanostructures using scanning probe microscope lithography
저자
by
Lee, Seunghyun
;
Kim, Jungoh
;
Shin, Wan Sub
;
Lee, Ha-Jin
;
Koo, Sunyoung
, et al.
소스
Materials Science & Engineering: C
. Jan2004, Vol. 24 Issue 1/2, p3. 7p.
Full Text (ScienceDirect)
Scopus
JCR 저널정보
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7 . Periodical
EUV stochastic noise analysis and LCDU mitigation by etching on dense contact-hole array patterns
저자
by
Wood, Obert R.
;
Panning, Eric M.
;
Kim, Seo Min
;
Koo, Sunyoung
;
Park, Jun-Taek
, et al.
소스
Proceedings of SPIE; April 2014, Vol. 9048 Issue: 1 p90480A-90480A-9, 814330p
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7 . Periodical
EUV mask defect analysis from mask to wafer printing
저자
by
Naulleau, Patrick P.
;
Hyun, Yoonsuk
;
Seo, Kangjoon
;
Kim, Kyuyoung
;
Lee, Inhwan
, et al.
소스
Proceedings of SPIE; April 2013, Vol. 8679 Issue: 1 p86790G-86790G-7, 781118p
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