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1 . Conference
Performance of immersion lithography for 45-nm-node CMOS and ultra-high density SRAM with 0.25um2.
저자
by
Mimotogi, Shoji
;
Uesawa, Fumikatsu
;
Tominaga, Makoto
;
Fujise, Hiroharu
;
Sho, Koutaro
, et al.
소스
Proceedings of SPIE; Nov2007, Issue 1, p652008-652008-9, 9p
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7 . Conference
Optical lithography technologies for 45-nm node CMOS.
저자
by
Mimotogi, Shoji
;
Uesawa, Fumikatsu
;
Kyoh, Suigen
;
Fujise, Hiroharu
;
Shiobara, Eishi
, et al.
소스
Proceedings of SPIE; Nov2005, Issue 1, p196-203, 8p
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7 . Conference
Integrated OPC approach to line-end shortening effects on the photomask and silicon levels for ArF attenuated PSM lithography.
저자
by
Sato, Shunichiro
;
Ozawa, Ken
;
Katsumata, Mikio
;
Ohnuma, Hidetoshi
.
소스
Proceedings of SPIE; Nov2004, Issue 1, p1093-1104, 12p
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6 . Conference
Lithography of choice for the 45-nm node: new medium, new wavelength, or new beam?
저자
by
Uesawa, Fumikatsu
;
Katsumata, Mikio
;
Ogawa, Kazuhisa
;
Takeuchi, Koichi
;
Omori, Shinji
, et al.
소스
Proceedings of SPIE; Nov2004, Issue 1, p34-45, 12p
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7 . Conference
Phase defect printability of alternating phase shift masks for ArF lithography.
저자
by
Ohba, Nobuyuki
;
Ishikawa, Kiichi
;
Katsumata, Mikio
;
Ohnuma, Hidetoshi
.
소스
Proceedings of SPIE; Nov2003, Issue 1, p756-765, 10p
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6 . Conference
Advanced pattern correction method for fabricating highly accurate reticles.
저자
by
Sato, Shunichiro
;
Koyama, Masaaki
;
Katsumata, Mikio
;
Kagami, Ichiro
;
Kawahira, Hiroichi
.
소스
Proceedings of SPIE; Nov2002, Issue 1, p196-204, 9p
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7 . Conference
Magnetic neutral loop discharge etching for 130-nm generation photomask fabrication.
저자
by
Katsumata, Mikio
;
Kawahira, Hiroichi
.
소스
Proceedings of SPIE; Nov2000 Part 2, Issue 1, p210-217, 8p
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4 . Conference
Photomask fabrication feasibility for next-generation reticle format.
저자
by
Katsumata, Mikio
;
Kawahira, Hiroichi
;
Nozawa, Satoru
.
소스
Proceedings of SPIE; Nov1997, Issue 1, p198-205, 8p
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5 . Conference
Manufacturing feasibility of OPC masks for 0.25-m rule devices.
저자
by
Kawahira, Hiroichi
;
Katsumata, Mikio
;
Tsudaka, Keisuke
;
Ogura, Akihiro
;
Tomita, Manabu
, et al.
소스
Proceedings of SPIE; Nov1996, Issue 1, p22-33, 12p
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7 . Conference
Chemically amplified resist process for 0.25-m generation photomasks.
저자
by
Katsumata, Mikio
;
Kawahira, Hiroichi
;
Sugawara, Minoru
;
Nozawa, Satoru
.
소스
Proceedings of SPIE; Nov1996, Issue 1, p96-104, 9p
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