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1 . Conference
Wafer edge overlay control for 28 nm and beyond technology node
저자
by
Rui Wang
;
Yuntao Jiang
;
Guogui Deng
;
Bin Xing
;
Chang Liu
, et al.
소스
2015 China Semiconductor Technology International Conference Semiconductor Technology International Conference (CSTIC), 2015 China. :1-4 Mar, 2015
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7 . Conference
Discussion on overlay control for 2X nm technology node and beyond
저자
by
Yuntao Jiang
;
Guogui Deng
;
Bin Xing
;
Gaorong Li
;
Jinan Hao
, et al.
소스
2015 China Semiconductor Technology International Conference Semiconductor Technology International Conference (CSTIC), 2015 China. :1-3 Mar, 2015
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7 . Conference
Study of CDSEM measurement issue caused by wafer charging
저자
by
Qiang Zhang
;
Guogui Deng
;
Bin Xing
;
Jingan Hao
;
Qiang Wu
, et al.
소스
2015 China Semiconductor Technology International Conference Semiconductor Technology International Conference (CSTIC), 2015 China. :1-3 Mar, 2015
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7 . Conference
Study of the ADR rinse effect on special residual type defect
저자
by
Bin Xing
;
Jing'an Hao
;
Guogui Deng
;
Qiang Wu
.
소스
2015 China Semiconductor Technology International Conference Semiconductor Technology International Conference (CSTIC), 2015 China. :1-3 Mar, 2015
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6 . Conference
A Weak Pattern Random Creation and Scoring Method for Lithography Process Tuning.
저자
by
Meili Zhang
;
Guogui Deng
;
Mudan Wang
;
Shirui Yu
;
Xinyi Hu
, et al.
소스
Proceedings of SPIE; 1/16/2018, Vol. 10588, p1-7, 7p
Find it @ DONGA
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7 .
A weak pattern random creation and scoring method for lithography process tuning
저자
by
Zhengfang Liu
;
Xinyi Hu
;
Kareem Madkour
;
Qijian Wan
;
Joe Kwan
, et al.
소스
Design-Process-Technology Co-optimization for Manufacturability XII
.
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7 .
Double Patterning Lithography Alignment and OVL-Control Strategy for 20nm Technology
저자
by
Guogui Deng
;
Ruixuan Huang
;
Jingan Hao
;
Junqing Zhou
;
Liwan Yue
, et al.
소스
ECS Transactions
. 60:173-178
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7 .
Study on Abnormal Intra-Field CD Uniformity in Exposure Scan Direction
저자
by
Xin Yao
;
Guogui Deng
;
Xuelong Shi
;
Bin Xing
;
Jingan Hao
, et al.
소스
ECS Transactions
. 60:205-212
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7 .
Studies of the Water-Spot like Defect in 28nm Metal Layer
저자
by
Guogui Deng
;
Bin Xing
;
Jian Zhao
;
Jingan Hao
;
Qiang Wu
.
소스
ECS Transactions
. 60:225-229
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7 .
The Focus Margin Gain and Limitation Realized by Focus Drilling in 28 nm Hole-Like Design Rules
저자
by
Jingan Hao
;
Guogui Deng
;
Gaorong Li
;
Tianhui Li
;
Qiang Wu
.
소스
ECS Transactions
. 52:221-226
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