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1 .
Si(100) epitaxy by low-temperature UHV-CVD: AFM study of the initial stages of growth
저자
by
Matty Caymax
;
Wilfried Vandervorst
;
Elie André
;
Frederic Chollet
.
소스
Journal of Crystal Growth
. 157:161-167
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6 .
Defect-free Stranski-Krastanov growth of strained Si1-xGex layers on Si
저자
by
Didier Dutartre
;
M. Berenguer
;
Isabelle Berbezier
;
Frederic Chollet
;
P. Warren
, et al.
소스
Journal of Crystal Growth
. 142:78-86
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7 .
Micro-optomechanical devices: an electrostatically actuated bending waveguide for optical coupling
저자
by
Frederic Chollet
;
Michel de Labachelerie
;
Hiroyuki Fujita
.
소스
SPIE Proceedings
.
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5 .
Atomic force microscope images of silica carbogel
저자
by
Bruno Chevalier
;
A. Borne
;
Elimame Elaloui
;
Andreas Gombert
;
Frederic Chollet
, et al.
소스
SPIE Proceedings
.
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7 .
Surface chemical investigation and topography study of hydrogen baked Si surfaces by infrared spectroscopy and Atomic Force Microscopy
저자
by
O. Vatel
;
W. Vandervorst
;
J. Alay
;
Bert Vermeire
;
Hugo Bender
, et al.
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7 .
Atomic Force Microscopy Investigation of Tensile-Stressed Silicon Grown by Rapid Thermal Chemical Vapour Deposition on Si0.68Ge0.32 Relaxed Pseudo-substrates
저자
by
Didier Dutartre
;
Elie André
;
Patricia Warren
;
Frederic Chollet
.
소스
Japanese Journal of Applied Physics
. 33:6437
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6 .
Atomic force microscopy studies of polysilicon growth during deposition on silicon
저자
by
Olivier Vatel
;
Frederic Chollet
;
E. André
;
F. Salvan
;
Ph. Dumas
.
소스
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
. 12:2037
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7 .
Roughness Assessment of Polysilicon Using Power Spectral Density
저자
by
Philippe Dumas
;
Olivier Vatel
;
Elie André
;
Franck Salvan
;
Frederic Chollet
.
소스
Japanese Journal of Applied Physics
. 32:5671
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7 .
Atomic Force Microscopy and Infrared Spectroscopy Studies of Hydrogen Baked Si Surfaces
저자
by
Bert Vermeire
;
Paul Mertens
;
Hugo Bender
;
Frederic Chollet
;
Steven Verhaverbeke
, et al.
소스
Japanese Journal of Applied Physics
. 32:L1489
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