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[1993] proceedings ieee micro electro mechanical systems, micro electro mechanical systems, 1993, mems '93, proceedings an investigation of micro structures, sensors, actuators, machines and systems. ieee. (2)
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[1991] proceedings. ieee micro electro mechanical systems, micro electro mechanical systems, 1991, mems '91, proceedings. an investigation of micro structures, sensors, actuators, machines and robots. ieee (1)
[1992] proceedings ieee micro electro mechanical systems, micro electro mechanical systems, 1992, mems '92, proceedings. an investigation of micro structures, sensors, actuators, machines and robot. ieee (1)
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