공지
2024학년도 하계방학 기간 도서관 이용안내
원문복사·상호대차 이용안내
특별회원 도서대출제도 변경 및 예치금 반환 안내
이전
다음
Close today
공지사항 닫기
DAU Library
Central Library
Dong-A University
LOGIN
Off-Campus Access
OFF
KO
Open the search box
Search"
Search
All
Library Catalog
eArticles
eJournals
Databases
e-Learning
e-Learning
INSPIRE
KOCW
Overseas OCW/MOOC List
eBooks
Collections
New Arrivals(Subject)
Popular Books
Recommendations
DAU Reading List
Book Gallery
Research book
Research Support
Journal Evaluation
Subject Guides
Plagiarism Prevention
Plagiarism Prevention
Research Ethics
References Management
Thesis Submission
Document Delivery Service/Interlibrary Loan
Document Delivery Service/Interlibrary Loan
Medicine, Nursing(Request_Journal)
Medicine, Nursing(Request_Thesis)
DDS/ILL – Request list
Library Instruction
Library Instruction Guide
Library Instruction Request
Group Instruction Request
Libaray Services
Use Using Materials
Borrow/Renew/Return
Inter-Campus Loan
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
Facilities
Group Study Room
Group Study Room Request
Reading Room
Visit Other Libraries(Data)
Visit Other Libraries for Material Use
Visit Other Libraries Request(Data)
Request History (Material Use)
Visit Other Libraries(Reading Room)
Visit Other Libraries Guide(Reading Room)
Visit Other Libraries Request(Reading Room)
Request History (Reading Room)
User Guide
Undergraduates
Graduates students
Faculty/Staff
Special member
Etc.
Mobile Service
Mobile Web
Mobile Seat Allocation
Mobile ID Card
WiFi
Off-Campus Access
Find Services
About our Library
Overview
Overview
History
Status
Regulations
Organization/Staff
Library Hours
Floor Guide
Donations
How to Donate
List
Cyber Memorial Collection
Directions
Community
Notice
Notice(Datebases)
Q&A
Q&A
FAQ
Book Reviews
Best Reviews
Program Feedback
Forms
Error Inquiry
My Library
Borrow/Renew
Borrow/Renew
History
Inter-Campus Loan List
My Request List
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
DDS – Request List
Group Study Room
Library Instruction
My Shelf
My Book Reviews
Personal Information
Profile
Notice
Quick Menu
My Shelf
Error Inquiry
메뉴 전체보기
eArticles
Home
>
Search
>
eArticles
>
All
Library Catalog
eArticles
eJournals
전체
ISSN
논문 제목
Journal Title
저자
발행년도
-
(ex : 2010-2015)
'
학술논문
' 에서의 검색결과
18
건 | List
1~10
Select All
Relevance
Date Newest
Date Oldest
5
10
20
30
40
50
E-Mail
EndNote
RefWorks
1 . Conference
Defect study of manufacturing feasible porous low k dielectrics direct polish for 45nm technology and beyond
저자
by
Hsu, Chia-Lin
;
Fang, Jeng Yu
;
Art Yu
;
Jack Lin
;
Climbing Huang
, et al.
소스
2009 IEEE International Interconnect Technology Conference Interconnect Technology Conference, 2009. IITC 2009. IEEE International. :140-142 Jun, 2009
Full Text (IEEE)
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
The TDDB failure mode and its engineering study for 45nm and beyond in porous low k dielectrics direct polish scheme.
저자
by
Chia-Lin Hsu
;
Kuan-Ting Lu
;
Wen-Chin Lin
;
Jeh-Chieh Lin
;
Chih-Hsien Chen
, et al.
소스
2010 IEEE International Reliability Physics Symposium (IRPS); 2010, p918-921, 4p
Full Text (IEEE)
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Academic Journal
Electrochemical Studies of W Corrosion for Low Resistive Contact in the 28 nm Technology Node.
저자
by
Chia-Lin Hsu
;
Dung-Ching Perng
;
Yen-Ming Chen
;
Shu-Min Huang
;
Yu-Ting Li
, et al.
소스
Journal of The Electrochemical Society; 2012, Vol. 159 Issue 2, pH162-H165, 4p
Web of Science
Scopus
JCR 저널정보
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
Chemical and Plasma Oxidation Behaviors of NiSi and NiPtSi Salicide Films in 65nm Node CMOS Process.
저자
by
Yu-Lan Chang
;
Yi-Wei Chen
;
Yi-Cheng Chen
;
Shieh, K.
;
Climbing Huang
, et al.
소스
2007 IEEE International Interconnect Technology Conference; 2007, p99-101, 3p
Full Text (IEEE)
요약보기
Export
E-Mail
EndNote
RefWorks
7 . Conference
Formation of Ni(Pt) Germanosilicide Using a Sacrificial Si Cap Layer.
저자
by
Yi-Wei Chen
;
Yu-Lan Chang
;
Yi-Cheng Chen
;
Shieh, K.
;
Climbing Huang
, et al.
소스
2007 IEEE International Interconnect Technology Conference; 2007, p37-39, 3p
Full Text (IEEE)
요약보기
Export
E-Mail
EndNote
RefWorks
7 .
Electrochemical Studies of W Corrosion for Low Resistive Contact in the 28 nm Technology Node
저자
by
Yen-Ming Chen
;
Juan-Yuan Wu
;
Chia-Lin Hsu
;
Yu-Ting Li
;
Climbing Huang
, et al.
소스
Journal of The Electrochemical Society
. 159:H162-H165
Web of Science
Scopus
JCR 저널정보
요약보기
Export
E-Mail
EndNote
RefWorks
7 .
Effects of BEOL copper CMP process on TDDB for direct polishing ultra-low k dielectric cu interconnects at 28nm technology node and beyond
저자
by
C. W. Hsu
;
Y. L. Hsieh
;
Wen-Chin Lin
;
Y. H. Su
;
Climbing Huang
, et al.
소스
2013 IEEE International Reliability Physics Symposium (IRPS)
.
요약보기
Export
E-Mail
EndNote
RefWorks
7 .
Micro-scratch reduction of replacement metal gate aluminum chemical mechanical polishing at 28nm technology node
저자
by
T. H. Hung
;
H. K. Hsu
;
W. C. Tsao
;
Y. L. Hsieh
;
Y. M. Lin
, et al.
소스
2012 IEEE International Interconnect Technology Conference
.
요약보기
Export
E-Mail
EndNote
RefWorks
7 .
Fast and accurate scatterometry metrology method for STI CMP step height process evaluation
저자
by
Chao-Yu Harvey Cheng
;
Juli Cheng
;
Wu-Sian Sie
;
Houssam Chouaib
;
Qiong-Yan Yuan
, et al.
소스
SPIE Proceedings
.
요약보기
Export
E-Mail
EndNote
RefWorks
7 .
A comprehensive process engineering on TDDB for direct polishing ultra-low k dielectric Cu interconnects at 40nm technology node and beyond
저자
by
Chi-Mao Hsu
;
J. F. Lin
;
C. M. Cheng
;
Juan-Yuan Wu
;
Climbing Huang
, et al.
소스
2011 International Reliability Physics Symposium
.
요약보기
Export
E-Mail
EndNote
RefWorks
1
2
Next
메일 발송
로그인후 이용해주세요.
이동하기
Full menu
Close full menu
Search
All
Library Catalog
eArticles
eJournals
Databases
e-Learning
e-Learning
INSPIRE
KOCW
Overseas OCW/MOOC List
eBooks
Collections
New Arrivals(Subject)
Popular Books
Recommendations
DAU Reading List
Book Gallery
Research book
Research Support
Journal Evaluation
Subject Guides
Plagiarism Prevention
Plagiarism Prevention
Research Ethics
References Management
Thesis Submission
Document Delivery Service/Interlibrary Loan
Document Delivery Service/Interlibrary Loan
Medicine, Nursing(Request_Journal)
Medicine, Nursing(Request_Thesis)
DDS/ILL – Request list
Library Instruction
Library Instruction Guide
Library Instruction Request
Group Instruction Request
Libaray Services
Use Using Materials
Borrow/Renew/Return
Inter-Campus Loan
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
Facilities
Group Study Room
Group Study Room Request
Reading Room
Visit Other Libraries(Data)
Visit Other Libraries for Material Use
Visit Other Libraries Request(Data)
Request History (Material Use)
Visit Other Libraries(Reading Room)
Visit Other Libraries Guide(Reading Room)
Visit Other Libraries Request(Reading Room)
Request History (Reading Room)
User Guide
Undergraduates
Graduates students
Faculty/Staff
Special member
Etc.
Mobile Service
Mobile Web
Mobile Seat Allocation
Mobile ID Card
WiFi
Off-Campus Access
Find Services
About our Library
Overview
Overview
History
Status
Regulations
Organization/Staff
Library Hours
Floor Guide
Donations
How to Donate
List
Cyber Memorial Collection
Directions
Community
Notice
Notice(Datebases)
Q&A
Q&A
FAQ
Book Reviews
Best Reviews
Program Feedback
Forms
Error Inquiry
My Library
Borrow/Renew
Borrow/Renew
History
Inter-Campus Loan List
My Request List
Purchase Request
Closed Stack Request
Priority Cataloging Book Request
Missing Book Request
DDS – Request List
Group Study Room
Library Instruction
My Shelf
My Book Reviews
Personal Information
Profile
Notice