2001 6th International Symposium on Plasma- and Process-Induced Damage (IEEE Cat. No.01TH8538) Plasma- and process-induced damage Plasma- and Process-Induced Damage, 2001 6th International Symposium on. :104-107 2001
Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium University/government/industry microelectronics University/Government/Industry Microelectronics Symposium, 1995., Proceedings of the Eleventh Biennial. :90-93 1995