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1 . Periodical
Micro-defect repair assisted with contour-based 2D metrology
저자
by
Buck, Peter D.
;
Gallagher, Emily E.
;
Shi, Irene
;
Guo, Eric
;
Lu, Max
, et al.
소스
Proceedings of SPIE; October 2017, Vol. 10451 Issue: 1 p104511U-104511U-7, 940607p
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7 . Periodical
Mask process correction method comparison and study: CD-SEM box versus standard correction method
저자
by
Buck, Peter D.
;
Gallagher, Emily E.
;
Tian, Mingjing
;
Lyu, Shizhi
;
Guo, Eric
, et al.
소스
Proceedings of SPIE; October 2017, Vol. 10451 Issue: 1 p104511T-104511T-6, 940606p
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7 . Periodical
Transparent and conductive backside coating of EUV lithography masks for ultra short pulse laser correction
저자
by
Buck, Peter D.
;
Gallagher, Emily E.
;
Maniyara, Rinu Abraham
;
Ghosh, Dhriti Sundar
;
Pruneri, Valerio
.
소스
Proceedings of SPIE; October 2017, Vol. 10451 Issue: 1 p104511S-104511S-9, 940609p
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7 . Periodical
Dual-line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
저자
by
Buck, Peter D.
;
Gallagher, Emily E.
;
Kim, Young-Gwang
;
Rhee, Hyug-Gyo
;
Ghim, Young-Sik
, et al.
소스
Proceedings of SPIE; October 2017, Vol. 10451 Issue: 1 p104511R-104511R-6, 940606p
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7 . Periodical
Aerial image ORC checks and their correlation to wafer-edge yield limitation for metals: a study and an OPC resolution
저자
by
Buck, Peter D.
;
Gallagher, Emily E.
;
Desouky, Tamer
;
Zhang, Yixiao
;
Terry, Mark
, et al.
소스
Proceedings of SPIE; October 2017, Vol. 10451 Issue: 1 p104511L-104511L-9, 940609p
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7 . Periodical
Improved testpatterns and coverage for complex SrAF to optimize 5nm and below OPC and mask patterning
저자
by
Buck, Peter D.
;
Gallagher, Emily E.
;
Guajardo, Marco A.
;
Abdelghany, Hesham
;
Omran, Ahmed
, et al.
소스
Proceedings of SPIE; October 2017, Vol. 10451 Issue: 1 p104511N-104511N-8, 940608p
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7 . Periodical
Direct laser writing: virtual mask optimization for optical quality control artefact
저자
by
Buck, Peter D.
;
Gallagher, Emily E.
;
Järvinen, Miikka
;
Scotti, Gianmario
;
Vainikka, Tuomas
, et al.
소스
Proceedings of SPIE; October 2017, Vol. 10451 Issue: 1 p104511Q-104511Q-9, 940609p
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7 . Periodical
Advanced process control based on litho-patterning density
저자
by
Buck, Peter D.
;
Gallagher, Emily E.
;
Ren, Yuping
;
Ning, Guoxiang
;
Jiang, Wenchao
, et al.
소스
Proceedings of SPIE; October 2017, Vol. 10451 Issue: 1 p104511M-104511M-7, 940607p
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7 . Periodical
Strategies on quantitative data preparation for OPC model calibration to reduce catastrophic failure at 7nm node
저자
by
Buck, Peter D.
;
Gallagher, Emily E.
;
Chen, Hong
.
소스
Proceedings of SPIE; October 2017, Vol. 10451 Issue: 1 p104511K-104511K-11, 10346601p
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5 . Periodical
Automatic SRAF printing detection based on contour extraction
저자
by
Buck, Peter D.
;
Gallagher, Emily E.
;
Cao, Liang
;
Zhang, Jie
;
Jiang, Wenchao
, et al.
소스
Proceedings of SPIE; October 2017, Vol. 10451 Issue: 1 p104511J-104511J-9, 940609p
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