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1 .
In-die actinic metrology on photomasks for low k1 lithography
저자
by
Dirk Beyer
;
Thomas Scheruebl
;
Ute Buttgereit
;
Axel Zibold
.
소스
SPIE Proceedings
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6 .
Process window enhancement for 45-nm node using alterable transmission phase-shifting materials
저자
by
Thomas Scheruebl
;
Ute Buttgereit
;
Axel Zibold
;
Guenter Hess
;
Lorenz Nedelmann
, et al.
소스
SPIE Proceedings
.
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7 .
Improved prediction of across chip linewidth variation (ACLV) with photomask aerial image CD metrology
저자
by
Bryan S. Kasprowicz
;
Michael Cangemi
;
Lloyd C. Litt
;
Eric Poortinga
;
Axel Zibold
, et al.
소스
SPIE Proceedings
.
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7 .
Printability study with polarization based AIMS fab 193i to investigate mask polarization effects
저자
by
Ulrich Stroessner
;
Rainer Schmid
;
Norbert Rosenkranz
;
Axel Zibold
;
Wolfgang Harnisch
, et al.
소스
22nd European Mask and Lithography Conference
.
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7 .
Extended process window using variable transmission PSM materials for 65-nm and 45-nm node
저자
by
Lorenz Nedelmann
;
Corinna Koepernik
;
Hans Becker
;
Mathias Irmscher
;
Robert Birkner
, et al.
소스
SPIE Proceedings
.
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7 .
First results for hyper NA scanner emulation from AIMS 45-193i
저자
by
Rigo Richter
;
Norbert Rosenkranz
;
Andrew Ridley
;
Axel Zibold
;
Ulrich Strössner
, et al.
소스
SPIE Proceedings
.
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7 .
An advanced study for defect disposition through 193-nm aerial imaging
저자
by
Klaus Böhm
;
Axel Zibold
;
Arndt C. Dürr
.
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SPIE Proceedings
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5 .
Compensating mask topography effects in CPL through-pitch solutions toward the 45nm node
저자
by
Joost Bekaert
;
Vicky Philipsen
;
Axel Zibold
;
Geert Vandenberghe
;
Doug Van Den Broeke
, et al.
소스
SPIE Proceedings
.
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7 .
Image imbalance compensation in alternating phase-shift masks towards the 45nm node through-pitch imaging
저자
by
Axel Zibold
;
Geert Vandenberghe
;
Wolfgang Degel
;
Bryan S. Kasprowicz
;
Lieve Van Look
.
소스
SPIE Proceedings
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7 .
Advances with the new AIMS fab 193 2nd generation: a system for the 65 nm node including immersion
저자
by
Eric Poortinga
;
Rainer Schmid
;
Hans Van Doornmalen
;
Wolfgang Harnisch
;
Thomas Scherübl
, et al.
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SPIE Proceedings
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