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1 . Periodical
Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
저자
by
Sendelbach, Matthew J.
;
Schuch, Nivea G.
;
Schelcher, Guillaume
;
Athayde, Marsil
;
Schoofs, Stijn
, et al.
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Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129550O-129550O-11, 12825462p
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7 . Periodical
Early defect detection for EUV self-aligned litho-etch litho-etch patterning with EPE
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by
Itani, Toshiro
;
Naulleau, Patrick P.
;
Gargini, Paolo A.
;
Ronse, Kurt G.
;
Anunciado, Roy
, et al.
소스
Proceedings of SPIE; December 2022, Vol. 12292 Issue: 1 p122920J-122920J-8, 1106289p
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7 . Conference
Assessment of variability and defectivity by high-throughput e-beam metrology for prediction of patterning defect probabilities.
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by
Wang, Fuming
;
Hunsche, Stefan
;
Anunciado, Roy
;
Corradi, Antonio
;
Hung Yu Tien
, et al.
소스
Proceedings of SPIE; 2018, Vol. 10585, p1-8, 8p
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7 . Conference
Early defect detection for EUV self-aligned litho-etch litho-etch patterning with EPE.
저자
by
Anunciado, Roy
;
Lee, Jisun
;
Barzegar, Ellaheh
;
van der Sanden, Stefan
;
Schelcher, Guillaume
, et al.
소스
Proceedings of SPIE; 9/17/2022, Vol. 12292, p122920J-122920J-8, 1p
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7 . Periodical
Process window limiting hot spot monitoring for high-volume manufacturing
저자
by
Sanchez, Martha I.
;
Ukraintsev, Vladimir A.
;
Jochemsen, Marinus
;
Anunciado, Roy
;
Timoshkov, Vadim
, et al.
소스
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97781R-97781R-10, 9680330p
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7 . Periodical
CDU budget breakdown as a diagnostic method for imaging sensitivity in HVM
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by
Erdmann, Andreas
;
Kye, Jongwook
;
Kim, Young Ki
;
Samudrala, Pavan
;
Gomez, Juan-Manuel
, et al.
소스
Proceedings of SPIE; March 2016, Vol. 9780 Issue: 1 p97801Q-97801Q-13, 9682313p
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7 . Periodical
Assessment of local variability by high-throughput e-beam metrology for prediction of patterning defect probabilities
저자
by
Ukraintsev, Vladimir A.
;
Adan, Ofer
;
Wang, Fuming
;
Hunsche, Stefan
;
Anunciado, Roy
, et al.
소스
Proceedings of SPIE; March 2018, Vol. 10585 Issue: 1 p1058525-1058525-8
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7 . Periodical
CD uniformity optimization at volume ramp up stage for new product introduction
저자
by
Cain, Jason P.
;
Sanchez, Martha I.
;
Kim, Jin-Soo
;
Ma, Won-Kwang
;
Kim, Young-Sik
, et al.
소스
Proceedings of SPIE; April 2014, Vol. 9050 Issue: 1 p905037-905037-8
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