Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2018, 436, pp.130-140. ⟨10.1016/j.nimb.2018.05.036⟩ Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2018, 436, pp.130-140. ⟨10.1016/j.nimb.2018.05.036⟩