Influence of Annealing Temperature on Mechanical and Wetting Properties of beta-FeSi2 Films Built Using Facing-Targets Direct-Current Sputtering
- Resource Type
- Journal
- Source
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY ; JAN 2020, 20 1, p621-p628, 8p.- Subject
- Language
- English
- ISSN
- 15334899