Exploration of the ultimate patterning potential of focused ion beams
- Resource Type
- Journal
- Authors
- Gierak, J; Bourhis, E; Madouri, A; Strassner, M; Sagnes, I; Bouchoule, S; Combes, MNM; Mailly, D; Hawkes, P; Jede, R; Bardotti, L; Prevel, B; Hannour, A; Melinon, P; Perez, A; Ferre, J; Jamet, JP; Mougin, A; Chappert, C; Mathet, V
- Source
- JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS; JAN-MAR 2006, 5 1, p011011 11p.
- Subject
- Language
- English
- ISSN
- 15371646